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Detection and mitigation of particle contaminants in MEMS devices

  • US 8,421,481 B2
  • Filed: 10/19/2010
  • Issued: 04/16/2013
  • Est. Priority Date: 10/20/2009
  • Status: Active Grant
First Claim
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1. A method for detecting particle contaminants in an integrated circuit device having a device structure and a sense node adjacent to the device structure, and having a particle detecting controller coupled to the device structure and the sense node, the method comprising:

  • during an operational mode;

    configuring and operating the particle detecting controller to set impedance of the sense node to a predetermined operational mode impedance value,and during a test mode;

    configuring and operating the particle detecting controller to set impedance of the sense node to a predetermined test mode impedance value higher than the predetermined operational mode impedance value, to place a test signal on the device structure, and to monitor the sense node for leakage current from the device structure, thereby detecting particles in the integrated circuit device.

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