Optical measurement apparatus including hemispherical optical integrator
First Claim
1. An optical measurement apparatus comprising:
- a hemispherical portion having a diffuse reflection layer on an inner wall; and
a plane portion, disposed to involve a substantial center of curvature of said hemispherical portion and close an opening of said hemispherical portion, having a reflection layer that faces an inner surface side of said hemispherical portion,said plane portion including;
at least one of a window for introducing light to be homogenized in an integrating space formed between said hemispherical portion and said plane portion, and a window for extracting light homogenized in said integrating space;
an outer portion formed of a first material chiefly causing specular reflection, and occupying at least a region of a predetermined width from an outermost circumference at which said plane portion abuts on the inner wall of said hemispherical portion; and
an inner portion formed of a second material chiefly causing diffuse reflection and having a higher reflectance for at least an ultraviolet region than said first material, and occupying a region inside said outer portion.
1 Assignment
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Accused Products
Abstract
An optical measurement apparatus includes a hemispherical portion having a diffuse reflection layer on an inner wall, and a plane portion disposed to involve a substantial center of curvature of the hemispherical portion and close an opening of the hemispherical portion, and having a reflection layer on an inner surface side of the hemispherical portion. The plane portion includes: at least one of a window for introducing light to be homogenized in an integrating space formed between the hemispherical portion and the plane portion, and a window for extracting light homogenized in the integrating space; an outer portion formed of a first material chiefly causing specular reflection, and occupying at least a region of a predetermined width from an outermost circumference; and an inner portion formed of a second material chiefly causing diffuse reflection and having a higher reflectance for at least an ultraviolet region than the first material.
9 Citations
10 Claims
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1. An optical measurement apparatus comprising:
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a hemispherical portion having a diffuse reflection layer on an inner wall; and a plane portion, disposed to involve a substantial center of curvature of said hemispherical portion and close an opening of said hemispherical portion, having a reflection layer that faces an inner surface side of said hemispherical portion, said plane portion including; at least one of a window for introducing light to be homogenized in an integrating space formed between said hemispherical portion and said plane portion, and a window for extracting light homogenized in said integrating space; an outer portion formed of a first material chiefly causing specular reflection, and occupying at least a region of a predetermined width from an outermost circumference at which said plane portion abuts on the inner wall of said hemispherical portion; and an inner portion formed of a second material chiefly causing diffuse reflection and having a higher reflectance for at least an ultraviolet region than said first material, and occupying a region inside said outer portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification