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Flow sensors having nanoscale coating for corrosion resistance

  • US 8,424,380 B2
  • Filed: 03/29/2012
  • Issued: 04/23/2013
  • Est. Priority Date: 12/18/2009
  • Status: Active Grant
First Claim
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1. A corrosion resistant sensor, comprising:

  • a package having a plurality of package bond pads;

    a sensor die mounted in the package, the sensor die including a sensing structure and a plurality of sensor bond pads electrically coupled to said sensing structure;

    a plurality of bond wires coupling said plurality of sensor bond pads to corresponding package bond pads; and

    a corrosion protection coating blanketed over the sensor die, the plurality of sensor bond pads, the package bond pads, and the bond wires.

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