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Mass for use in a micro-electro-mechanical-system sensor and 3-dimensional micro-electro-mechanical-system sensor using same

  • US 8,424,383 B2
  • Filed: 01/05/2010
  • Issued: 04/23/2013
  • Est. Priority Date: 01/05/2010
  • Status: Active Grant
First Claim
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1. A 3-dimensional MEMS sensor, comprising:

  • a first axis fixed electrode;

    a second axis fixed electrode;

    a third axis fixed electrode;

    a movable electrode frame including a first axis movable electrode, a second axis movable electrode, a third axis movable electrode, and a connection part connecting the movable electrodes, wherein the first axis movable electrode and the first axis fixed electrode form a first capacitor along the first axis, the second axis movable electrode and the second axis fixed electrode form a second capacitor along the second axis, and the third axis movable electrode and the third axis fixed electrode form a third capacitor along the third axis, the connection part including a center mass, wherein the center mass is connected with at least one of the first, second and third axis movable electrodes, and has an outer periphery and a first interconnecting segment directly and straightly connecting at least two adjacent sides of the outer periphery;

    at least one spring connecting with the movable electrode frame; and

    at least one anchor connecting with the spring,wherein the first, second and third axes are not parallel to one another such that they define a 3-dimensional coordinate system.

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