Methods and apparatus for measuring analytes using large scale FET arrays
First Claim
1. An apparatus, comprising:
- an array of sensors for detecting a chemical reaction at a plurality of reaction sites, each sensor in the array having at least one chemically-sensitive field effect transistor (chemFET), wherein a plurality of the sensors in the array have a horizontal or vertical array pitches of ten micrometers or less; and
wherein body terminals of a first chemFET and a second chemFET of sensors in the array are connected to a common body bias voltage source line.
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Abstract
Methods and apparatus relating to very large scale FET arrays for analyte measurements. ChemFET (e.g., ISFET) arrays may be fabricated using conventional CMOS processing techniques based on improved FET pixel and array designs that increase measurement sensitivity and accuracy, and at the same time facilitate significantly small pixel sizes and dense arrays. Improved array control techniques provide for rapid data acquisition from large and dense arrays. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in a wide variety of chemical and/or biological processes. In one example, chemFET arrays facilitate DNA sequencing techniques based on monitoring changes in hydrogen ion concentration (pH), changes in other analyte concentration, and/or binding events associated with chemical processes relating to DNA synthesis.
423 Citations
26 Claims
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1. An apparatus, comprising:
an array of sensors for detecting a chemical reaction at a plurality of reaction sites, each sensor in the array having at least one chemically-sensitive field effect transistor (chemFET), wherein a plurality of the sensors in the array have a horizontal or vertical array pitches of ten micrometers or less; and
wherein body terminals of a first chemFET and a second chemFET of sensors in the array are connected to a common body bias voltage source line.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An apparatus, comprising:
an array of sensors, each sensor comprising a chemically-sensitive field effect transistor (chemFET), the chemFET comprising; a floating gate structure; a source and a drain having a first semiconductor type and in a region having a second semiconductor type; and a plurality of contacts positioned along a perimeter of the region having the second semiconductor type, wherein the contacts couple the region to a patterned line overlying the region. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
Specification