Apparatus and method for microfabricated multi-dimensional sensors and sensing systems

• US 8,426,932 B2
• Filed: 10/12/2011
• Issued: 04/23/2013
• Est. Priority Date: 07/17/2007
• Status: Active Grant

• Current Assignee: Sensirion AG (Sensirion Holding AG)
• Original Assignee: KWJ Engineering, Inc. (Interlink Electronics Incorporated)
• Inventors: Stetter, Joseph R.
• Primary Examiner(s): NGUYEN, CUONG QUANG
• Application Number:
  US13/271,659
• Publication Number:
  US 20120050038A1
• Time in Patent Office: 559 Days
• Field of Search: 257415-420, 257/E29.105, 257/E21.002
• US Class Current: 257/415
• CPC Class Codes: A61B 2560/0242 adapted to measure environmental factors, e.g. temperature, pollution
• CPC Class Codes: A61B 2562/028 Microscale sensors, e.g. electromechanical sensors [MEMS]
• CPC Class Codes: A61B 5/0205 Simultaneously evaluating both cardiovascular conditions and different types of body conditions, e.g. heart and respiratory condition
• CPC Class Codes: A61B 5/021 Measuring pressure in heart or blood vessels A61B5/0205 takes precedence
• CPC Class Codes: A61B 5/024 Detecting, measuring or recording pulse rate or heart rate A61B5/0205, A61B5/021 take precedence
• CPC Class Codes: A61B 5/0816 Measuring devices for examining respiratory frequency measuring frequency of electric signals G01R23/00
• CPC Class Codes: A61B 5/14551 for measuring blood gases

Abstract

A universal microelectromechanical (MEMS) nano-sensor platform having a substrate and conductive layer deposited in a pattern on the surface to make several devices at the same time, a patterned insulation layer, wherein the insulation layer is configured to expose one or more portions of the conductive layer, and one or more functionalization layers deposited on the exposed portions of the conductive layer to make multiple sensing capability on a single MEMS fabricated device. The functionalization layers are adapted to provide one or more transducer sensor classes selected from the group consisting of: radiant, electrochemical, electronic, mechanical, magnetic, and thermal sensors for chemical and physical variables and producing more than one type of sensor for one or more significant parameters that need to be monitored.

Claims

1. A monitoring device, comprising:

a. wireless communication equipment; and

b. at least one sensor or sensing system utilizing microelectromechanical systems (MEMS) technology that consumes less than 500 μ

W of power;

wherein data gathered from the at least one sensor or sensing system is transferred by the wireless communication equipment to a node or ultimately to a central communication hub, wherein the at least one sensor or sensing system utilizing MEMS technology comprises at least one surrounding environmental condition sensor configured to detect one or more changes in an environment.

2. The monitoring device of claim 1, wherein the at least one sensor or sensing system utilizing MEMS technology further comprises at least one vital sign sensor.

3. The monitoring device of claim 2, wherein the at least one vital sign sensor senses a vital sign selected from the group consisting of heart rate, body temperature, respiration rate, blood pressure, pulse oximetry and any combination thereof.

4. The monitoring device of claim 1, wherein the at least one sensor or sensing system utilizing MEMS technology comprises at least one gas sensor.

5. The monitoring device of claim 4, wherein the at least one gas sensor senses a gas selected from the group consisting of hydrogen, methane, carbon monoxide, hydrogen sulfide, chlorine, ozone, diesel particulates, gasoline fumes, ethanol, oxygen, carbon dioxide, and combinations thereof.

6. The monitoring device of claim 1, wherein the at least one sensor or sensing system utilizing MEMS technology further comprises at least one surrounding environmental condition sensor.

7. The monitoring device of claim 6, wherein the at least one surrounding environmental condition sensor senses a surrounding environmental condition selected from the group consisting of temperature, pressure, radiation, moisture, and combinations thereof.

8. The monitoring device of claim 1, further comprising at least one of an audible alarm, a visual alarm and/or a tactile alarm.

9. The monitoring device of claim 1, further comprising an integrated global positioning system.

10. The monitoring device of claim 1, wherein the monitoring device is incorporated on or within an earpiece or can be worn on or around the face or human body.

11. The monitoring device of claim 9, wherein the at least one sensor or sensing system utilizing MEMS technology comprises a vital sign sensor and or gas sensor designed for contact with an ear.

12. The monitoring device of claim 10, further comprising at least one hazardous gas sensor or sensing system utilizing MEMS technology.

13. The monitoring device of claim 10, further comprising at least one surrounding environmental condition sensor or sensing system utilizing MEMS technology that results in a sensor with less that 500 uW power.

14. The monitoring device of claim 1, wherein the wireless communication equipment comprises a cellphone.

15. The monitoring device of claim 14, wherein the cellphone further comprises a software application that can receive computed information from the central communications hub to provide communication back to the device worn by the individual.

16. A wearable sensor platforms for awareness, wherein the sensor provides medical alerts through vital signs, other medical sensors, or environmental sensors, wherein the sensor platform comprise less than 500 uWatts power, and wherein the sensor platform comprises at least one MEMS sensor configured to detect one or more chemical changes to an environment.