Probe card assembly having an actuator for bending the probe substrate
First Claim
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1. A fully assembled probe card assembly comprising:
- a drive plate;
a probe substrate coupled to said drive plate, said probe substrate comprising a first surface from which a plurality of spring contact structures extend and a second surface opposite said first surface, ones of said spring contact structures comprising contact portions disposed in a pattern that corresponds to terminals of an electronic device to be tested;
a wiring substrate comprising an electrical interface connectable to a tester configured to control testing of said electronic device, wherein ones of said spring contact structures are electrically connected to said electrical interface; and
flexible electrical connections disposed between and electrically connecting said wiring substrate and said probe substrate; and
studs connected to said drive plate and extending toward said probe substrate, each said stud positioned to apply a force to a different region of said second surface of said probe substrate,wherein a first of said studs positioned to apply a force to a first of said regions comprises an actuator that can be activated to selectively push said first of said regions toward and pull said first of said regions away from said drive plate to bend said probe substrate sufficiently to change a shape of said probe substrate.
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Abstract
A planarizer for a probe card assembly. A planarizer includes a first control member extending from a substrate in a probe card assembly. The first control member extends through at least one substrate in the probe card assembly and is accessible from an exposed side of an exterior substrate in the probe card assembly. Actuating the first control member causes a deflection of the substrate connected to the first control member.
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Citations
14 Claims
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1. A fully assembled probe card assembly comprising:
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a drive plate; a probe substrate coupled to said drive plate, said probe substrate comprising a first surface from which a plurality of spring contact structures extend and a second surface opposite said first surface, ones of said spring contact structures comprising contact portions disposed in a pattern that corresponds to terminals of an electronic device to be tested; a wiring substrate comprising an electrical interface connectable to a tester configured to control testing of said electronic device, wherein ones of said spring contact structures are electrically connected to said electrical interface; and flexible electrical connections disposed between and electrically connecting said wiring substrate and said probe substrate; and studs connected to said drive plate and extending toward said probe substrate, each said stud positioned to apply a force to a different region of said second surface of said probe substrate, wherein a first of said studs positioned to apply a force to a first of said regions comprises an actuator that can be activated to selectively push said first of said regions toward and pull said first of said regions away from said drive plate to bend said probe substrate sufficiently to change a shape of said probe substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification