Device for optical imaging, tracking, and position measurement with a scanning MEMS mirror
First Claim
1. An optical tracking system, comprising:
- at least one optical detector unit having a scanning mirror and one or more fixed photodetectors located near the scanning mirror,wherein the scanning mirror is configured to rotate about one or more axes in order to deflect a light beam from a source towards a target and the photodetectors are configured to collect a portion of the light beam that is reflected from the target, wherein the one or more fixed photodetectors are configured such that the optical path from the source to the optical detector unit does not intersect the scanning mirror along a return portion of the optical path from the target to the one or more photodetectors.
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Abstract
An optical tracking system can include at least one scanning detector having a scanning mirror and one or more fixed photo-detectors located near the scanning mirror. The scanning mirror can be configured to deflect a light beam from a source towards a retroreflective target and the photodetectors are configured to collect a portion of the light beam that is retroreflected from the target. A scanning optical detector apparatus may optionally comprise a substrate, a scanning mirror having at least one portion monolithically integrated into the substrate, and one or more photodetectors monolithically incorporated into the substrate. It is emphasized that this abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the claims'"'"' scope or meaning.
101 Citations
20 Claims
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1. An optical tracking system, comprising:
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at least one optical detector unit having a scanning mirror and one or more fixed photodetectors located near the scanning mirror, wherein the scanning mirror is configured to rotate about one or more axes in order to deflect a light beam from a source towards a target and the photodetectors are configured to collect a portion of the light beam that is reflected from the target, wherein the one or more fixed photodetectors are configured such that the optical path from the source to the optical detector unit does not intersect the scanning mirror along a return portion of the optical path from the target to the one or more photodetectors. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A scanning optical detector apparatus, comprising:
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a substrate; one or more photodetectors monolithically incorporated into the substrate in fixed positions; and a scanning mirror having at least one portion monolithically integrated into the substrate, wherein the mirror is configured to rotate about one or more axes with respect to the one or more photo detectors, wherein the scanning mirror is configured to rotate about one or more axes in order to deflect a light beam from a source towards a target and the one or more photodetectors are configured to collect a portion of a light beam that is reflected from the target, wherein the one or more photodetectors are configured such that the optical path from the source to the optical detector unit does not intersect the scanning mirror along a return portion of the optical path from the target to the one or more photodetectors. - View Dependent Claims (17, 18, 19, 20)
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Specification