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Dynamic action abrasive lapping workholder

  • US 8,430,717 B2
  • Filed: 10/12/2010
  • Issued: 04/30/2013
  • Est. Priority Date: 10/12/2010
  • Status: Expired due to Fees
First Claim
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1. A dynamic action rotatable workholder apparatus that positions workpieces in flat-surfaced single-sided abrading contact with a rotatable abrading platen that is activated by abrading friction contact forces to move the workpieces away from contact with the rotatable abrading platen comprising:

  • a) an abrading machine frame;

    b) a workholder apparatus frame attached to the abrading machine frame by a mechanism that allows the workholder apparatus frame to be moved away from or toward the abrading machine frame;

    c) a rotatable workholder plate having a flat-surfaced workpiece attachment surface and having a rotatable workholder plate rotation axis that is perpendicular to and is located at a center of the rotatable workholder plate flat-surfaced workpiece attachment surface where the rotatable workholder plate can be rotated about the rotatable workholder plate rotation axis and wherein the rotatable workholder plate is moveably attached to the workholder apparatus frame;

    d) a rotatable abrading platen having an approximately horizontal flat annular abrading-surface and having a rotatable abrading platen rotation axis that is perpendicular to and is located at a center of the rotatable abrading platen approximately-horizontal flat annular abrading-surface where the rotatable abrading platen can be rotated about the rotatable abrading platen rotation axis and where the rotatable abrading platen is moveably attached to the abrading machine frame;

    e) wherein the rotatable abrading platen approximately horizontal flat annular abrading-surface has an abrasive layer provided by an abrasive device selected from the group consisting of flexible abrasive disks, flexible raised-island abrasive disks, flexible abrasive disks with resilient backing layers, flexible abrasive disks with resilient backing layers having a vacuum-seal polymer backing layer, flexible abrasive disks having attached solid abrasive pellets, flexible chemical mechanical planarization resilient disk pads with liquid abrasive slurries, flexible chemical mechanical planarization resilient disk pads having nap covers, flexible shallow-island chemical mechanical planarization abrasive disks, flexible shallow-island abrasive disks with resilient backing layers having a vacuum-seal polymer backing layer, flexible flat-surfaced metal or polymer disks, and liquid abrasive-slurry layers;

    f) workpieces having parallel opposed workpiece flat top surfaces and workpiece flat bottom surfaces, wherein the workpieces'"'"' flat top surfaces are attached to the rotatable workholder plate flat-surfaced workpiece attachment surface;

    g) wherein the workholder apparatus frame can be positioned at a location on the abrading machine frame where workpieces attached to the rotatable workholder plate flat-surfaced workpiece attachment surface are in flat-surfaced abradable contact with the rotatable abrading platen annular abrading-surface abrasive coating;

    h) an abrading friction force-activated locking mechanism that is attached to the workholder apparatus frame wherein the abrading friction force activated locking mechanism can be engaged to hold the workholder apparatus frame at a location on the abrading machine frame or where the abrading friction force activated locking mechanism can be disengaged to allow the workholder apparatus frame to be moved away from a location on the abrading machine frame;

    i) wherein a motion-inducing force device is attached to the workholder apparatus frame where the motion inducing force device can apply an acceleration force to the workholder apparatus frame to move the workholder apparatus frame away from the location on the abrading machine frame wherein workpieces attached to the rotatable workholder plate are moved away from contact with the rotatable abrading platen;

    j) where the engaged workholder apparatus abrading friction force activated locking mechanism can act against a motion inducing force device acceleration force to hold the workholder apparatus frame at a location on the abrading machine frame;

    k) wherein controlled workpiece abrading forces can be applied to workpieces attached to the rotatable workholder plate when the workholder apparatus frame is positioned at a location on the abrading machine frame where the flat bottom surfaces of workpieces attached to the rotatable workholder plate are in flat-surfaced abradable contact with the rotatable abrading platen annular abrading-surface abrasive layer wherein the controlled workpiece abrading forces urge the flat bottom surfaces of the workpieces against the rotatable abrading platen annular abrading-surface abrasive layer;

    l) wherein an abrading friction force activated locking mechanism activation device can be activated to disengage the abrading friction force activated locking mechanism by abrading friction contact forces that are imposed upon workpieces attached to the rotatable workholder plate by the rotating abrading platen abrasive layer that is in abrading contact with the attached workpieces and therein imposed upon the abrading friction force activated locking mechanism activation device that is coupled to the rotatable workholder plate;

    m) wherein the abrading friction force activated locking mechanism activation device has an adjustable force set-point where the abrading friction force activated locking mechanism activation device can be activated by abrading friction contact forces applied to the abrading friction force activated locking mechanism activation device that exceed the abrading friction force activated locking mechanism activation device adjusted force set-point wherein the abrading friction force activated locking mechanism is disengaged;

    n) wherein workpieces can be attached to the rotatable workholder plate wherein the workholder apparatus frame can be positioned at a location on the abrading machine frame wherein theabrading friction force activated locking mechanism can be engaged to hold the workholder apparatus frame at the location on the abrading machine frame and wherein a motion inducing force device is attached to the workholder apparatus frame where the motion inducing force device applies an acceleration force to the workholder apparatus frame wherein attached workpieces'"'"' flat bottom surfaces are in flat-surfaced abradable contact with the rotatable abrading platen annular abrading-surface abrasive layer wherein controlled workpiece abrading forces can be applied to the attached workpieces to urge the attached workpieces'"'"' flat bottom surfaces against the rotatable abrading platen annular abrading-surface abrasive layer wherein the workpieces attached to the rotatable workholder plate can be rotated about the rotatable workholder plate rotational axis and wherein the rotatable abrading platen can be rotated about the rotatable abrading platen rotation axis to single-side abrade the attached workpieces'"'"' bottom surfaces;

    o) wherein abrading friction contact forces can be imposed upon the attached workpieces and therein imposed upon the abrading friction force activated locking mechanism by the rotating abrading platen abrasive layer in abrading contact with the attached workpieces;

    p) wherein the abrading friction force activated locking mechanism can be activated when the abrading friction contact forces exceed the abrading friction force activated locking mechanism activation device adjustable set-point to disengage the abrading friction force activated locking mechanism wherein the workholder apparatus frame is moved by the motion inducing force device acceleration force away from the location on the abrading machine frame wherein the attached workpieces are moved away from contact with the rotatable abrading platen approximately horizontal annular abrading-surface.

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