Method for forming a compound semi-conductor thin-film
First Claim
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1. A method of fabricating a light-absorbing thin-film, comprising:
- providing a plurality of raw semiconductor materials;
pre-reacting the raw semiconductor materials to form a homogeneous compound semiconductor target material; and
depositing the compound semiconductor target material onto a substrate to form a light-absorbing thin-film having a composition substantially the same as a composition of the compound semiconductor target material.
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Abstract
A method is provided for fabricating a thin film semiconductor device. The method includes providing a plurality of raw semiconductor materials. The raw semiconductor materials undergo a pre-reacting process to form a homogeneous compound semiconductor target material. The compound semiconductor target material is deposited onto a substrate to form a thin film having a composition substantially the same as a composition of the compound semiconductor target material.
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Citations
30 Claims
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1. A method of fabricating a light-absorbing thin-film, comprising:
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providing a plurality of raw semiconductor materials; pre-reacting the raw semiconductor materials to form a homogeneous compound semiconductor target material; and depositing the compound semiconductor target material onto a substrate to form a light-absorbing thin-film having a composition substantially the same as a composition of the compound semiconductor target material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method of fabricating a photovoltaic device, comprising:
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forming a first electrode on a substrate; forming a light absorbing layer on the first electrode, wherein forming the light absorbing layer includes; providing a plurality of raw semiconductor materials; pre-reacting the raw semiconductor materials to form a homogeneous compound semiconductor target material; and depositing the compound semiconductor target material onto a substrate to form a thin-film having a composition substantially the same as a composition of the compound semiconductor target material; and forming a second electrode over the light absorbing layer. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30)
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Specification