Process for fabricating metal bus lines for OLED lighting panels

• US 8,432,095 B2
• Filed: 05/11/2011
• Issued: 04/30/2013
• Est. Priority Date: 05/11/2011
• Status: Active Grant

• Current Assignee: Universal Display Corporation
• Original Assignee: Universal Display Corporation
• Inventors: Pang, Huiqing, Levermore, Peter, Rajan, Kamala, Krall, Emory, Ma, Ruiqing (Ray), Burrows, Paul E.
• Primary Examiner(s): WALFORD, NATALIE K
• Application Number:
  US13/105,770
• Publication Number:
  US 20120286648A1
• Time in Patent Office: 720 Days
• Field of Search: None
• US Class Current: 313/504
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: C23C 14/24 Vacuum evaporation
• CPC Class Codes: H05B 33/10 Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
• CPC Class Codes: H10K 2101/10 Triplet emission
• CPC Class Codes: H10K 2102/311 Flexible OLED
• CPC Class Codes: H10K 2102/341 Short-circuit prevention
• CPC Class Codes: H10K 50/00 Organic light-emitting devices integrated devices or assemblies of multiple devices H10K59/00, H10K65/00; organic semiconductor lasers H01S5/36
• CPC Class Codes: H10K 50/11 characterised by the electroluminescent [EL] layers
• CPC Class Codes: H10K 50/805 Electrodes
• CPC Class Codes: H10K 50/814 combined with auxiliary electrodes, e.g. ITO layer combined with metal lines
• CPC Class Codes: H10K 50/824 combined with auxiliary electrodes
• CPC Class Codes: H10K 59/1315 comprising structures specially adapted for lowering the resistance
• CPC Class Codes: H10K 59/1795 comprising structures specially adapted for lowering the resistance
• CPC Class Codes: H10K 59/84 Parallel electrical configurations of multiple OLEDs
• CPC Class Codes: H10K 59/86 Series electrical configurations of multiple OLEDs
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/621 Providing a shape to conductive layers, e.g. patterning or selective deposition
• CPC Class Codes: H10K 77/111 Flexible substrates

Abstract

Systems and methods for the design and fabrication of OLEDs, including high-performance large-area OLEDs, are provided. Variously described fabrication processes may be used to deposit and pattern bus lines with a smooth profile and a gradual sidewall transition. Such smooth profiles may, for example, reduce the probability of electrical shorting at the bus lines. Accordingly, in certain circumstances, an insulating layer may no longer be considered essential, and may be optionally avoided altogether. In cases where an insulating layer is not used, further enhancements in the emissive area and shelf life of the device may be achieved as well. According to aspects of the invention, bus lines such as those described herein may be deposited, and patterned, using vapor deposition such as vacuum thermal evaporation (VTE) through a shadow mask, and may avoid multiple photolithography steps. Other vapor deposition systems and methods may include, among others, sputter deposition, e-beam evaporation and chemical vapor deposition (CVD). A final profile of the bus line may substantially correspond to the profile as deposited.

Claims

1. A method of manufacturing a light emitting panel with a plurality of bus lines, the method comprising:

forming a first electrode layer;

forming an organic layer stack over the first electrode layer;

forming a second electrode layer over the organic layer stack; and

patterning a plurality of bus lines by vapor deposition through a shadow mask,

wherein, the plurality of bus lines are formed in electrical contact with at least one of the first electrode layer and the second electrode layer, and

a final profile shape of the bus lines corresponds to a profile shape of the bus lines as deposited.

2. The method of claim 1, wherein the plurality of bus lines are in electrical contact with the first electrode layer and the first electrode layer is deposited before the plurality of bus lines.

3. The method of claim 1, wherein the plurality of bus lines are in electrical contact with the first electrode layer and the plurality of bus lines are deposited before the first electrode layer.

4. The method of claim 1, wherein the patterning of the plurality of bus lines includes at least one of vacuum thermal evaporation (VTE) deposition, sputter deposition, e-beam evaporation and chemical vapor deposition (CVD).

5. The method of claim 1, wherein the patterning of the plurality of bus lines includes deposition by VTE through the shadow mask.

6. The method of claim 5, wherein the patterning of the plurality of bus lines comprises at least one of (a) selecting a thickness of the shadow mask, (b) selecting a position of a material source with respect to the shadow mask and (c) controlling the gap between the substrate and the shadow mask based on the desired final profile shape of the bus lines.

7. The method of claim 6, wherein the thickness of the shadow mask is in a range of approximately 20 microns to 500 microns.

8. The method of claim 6, wherein the angle between the line connecting source and center of the substrate and the normal line of the substrate is in a range of approximately 0°

to 20°

.

9. The method of claim 1, wherein the organic layer stack is grown on the bus lines without an interceding insulator.

10. The method of claim 1, further comprising forming an insulator between the organic layer stack and the bus lines.

11. The method of claim 10, wherein the insulator is formed without breaking a vacuum formed during the patterning of the bus lines by vapor deposition.

12. The method of claim 11, wherein the final profile shape of the insulating layer corresponds to a profile shape of the insulating layer as deposited.

13. The method of claim 1, wherein the forming of the first electrode layer, the forming of the organic layer stack, the forming of the second electrode layer and the patterning of the bus lines are performed without wet processing.

14. The method of claim 1, wherein a slope angle of a sidewall of the bus line is in a range of 0.01°

-30°

, the slope angle measured based on a line between two points on the bus line sidewall at 10% and 90% respectively of bus line thickness.

15. The method of claim 14, wherein the maximum absolute value of the second derivative of the sidewall profile of the bus line layer is <

1.0.

16. The method of claim 14, wherein a root-mean-square (RMS) of the surface roughness of the bus line layer along the sidewall is <

30 nm.

17. The method of claim 1, wherein the plurality of bus lines are in electrical contact with the second electrode layer and the second electrode layer is deposited before the plurality of bus lines.

18. The method of claim 1, wherein the plurality of bus lines are in electrical contact with the second electrode layer and the plurality of bus lines are deposited before the second electrode layer.

19. The method of claim 1, wherein a first set of the plurality of bus lines are in electrical contact with the first electrode layer and a second set of the plurality of bus lines are in electrical contact with the second electrode layer.