Holding apparatus, position detection apparatus and exposure apparatus, moving method, position detection method, exposure method, adjustment method of detection system and device manufacturing method

• US 8,432,534 B2
• Filed: 05/07/2009
• Issued: 04/30/2013
• Est. Priority Date: 11/09/2006
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Shibazaki, Yuichi
• Primary Examiner(s): FRASER, STEWART A
• Application Number:
  US12/437,079
• Publication Number:
  US 20090233234A1
• Time in Patent Office: 1,454 Days
• Field of Search: 250/492.22, 250/548, 355/52, 355/53, 355 72- 75, 356399-401
• US Class Current: 355/75
• CPC Class Codes: G03F 7/70816 Bearings
• CPC Class Codes: G03F 7/7085 Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load

Abstract

By a force generation device which can generate a magnetic attraction and gas static pressure between a detection system provided on a lower surface side of an FIA surface plate and a surface plate, a predetermined clearance is formed between the detection system and the surface plate, and in a state where the clearance is formed (a floating state), the detection system is driven by a drive device in at least an uniaxial direction within a horizontal plane. Therefore, because the detection system is in a non-contact state to the base platform, movement (positioning) of the detection system with high precision becomes possible. Further, by setting an attraction larger than a repulsion generated by the force generation device, the detection system can be fixed (landed) in a state positioned with high precision.

Claims

1. A holding apparatus that movably holds a detection system which detects a mark on an object, the apparatus comprising:

a support device which supports the detection system; and

a drive device which drives the detection system supported via a predetermined clearance by the support device at least in a uniaxial direction in a horizontal plane, wherein

the support device includes a force generation device which generates an attraction and a repulsion between the support device and the detection system.

2. The holding apparatus according to claim 1 wherein

the support device supports the detection system by suspension with the attraction.

3. The holding apparatus according to claim 2 wherein

the support device makes the clearance be approximately zero at a time when the detection system is fixed.

4. The holding apparatus according to claim 3 wherein

the support device forms the clearance by adjusting a force between the support device and the detection system at a time of the drive.

5. The holding apparatus according to claim 2 wherein

the detection system, and the support device adjusts at least one of the attraction and the repulsion to form the clearance.

6. The holding apparatus according to claim 5 wherein

the support device makes the repulsion be approximately zero at a time when the detection system is fixed.

7. The holding apparatus according to claim 5 wherein

the attraction and repulsion generated between the support device and the detection system substantially act on the same position of the detection system.

8. The holding apparatus according to claim 5, further comprising:

a controller which controls the drive device to maintain a position of the detection system within a horizontal plane substantially constant, during a time the repulsion is reduced to near zero while the attraction of the force generation device is generated.

9. The holding apparatus according to claim 2 wherein

the force generation device generates a magnetic attraction as the attraction between the support device and the detection system.

10. The holding apparatus according to claim 9 wherein

the force generation device has a magnetic material member which is provided in at least one of a fixed portion of the support device and the detection system, and a magnet member provided in the other of the fixed portion and the detection system.

11. The holding apparatus according to claim 2 wherein

the force generation device includes a static gas bearing as a repulsion generation device which generates a repulsion between the support device and the detection system.

12. The holding apparatus according to claim 11 wherein

the static gas bearing is arranged on the detection system.

13. The holding apparatus according to claim 12 wherein

gas is supplied to the static gas bearing via a fixed portion of the support device on which the detection system is placed.

14. The holding apparatus according to claim 12 wherein

the static gas bearing is arranged at three places of a predetermined plane of the detection system that faces a fixed portion of the support device.

15. The holding apparatus according to claim 2 wherein

the force generation device has a plurality of permanent magnets arranged in the detection system as an attraction generation device which generates the attraction between the support device and the detection system and also has a plurality of air pads arranged in the detection system as a repulsion generation device which generates the repulsion between the support device and the detection system, whereby

a centroid of a figure which is formed by connecting positions of the plurality of permanent magnets and a centroid of a figure formed by connecting positions of the plurality of air pads substantially coincide with each other.

16. The holding apparatus according to claim 1 wherein

the support device supports the detection system by suspension, the force generation device can generate forces in directions opposite to each other in a vertical direction between the support device and the detection system, and the clearance is maintained by both of the forces in directions opposite to each other at least during the drive.

17. The holding apparatus according to claim 16 wherein

the support device adjusts at least one of the forces in directions opposite to each other to form the clearance.

18. The holding apparatus according to claim 16 wherein

the support device makes the clearance be approximately zero at a time when the detection system is fixed.

19. The holding apparatus according to claim 16 wherein

an attraction and a repulsion generated between the support device and the detection system substantially act on the same position of the detection system.

20. The holding apparatus according to claim 16, further comprising:

a controller which controls the drive device to maintain a position of the detection system within a horizontal plane substantially constant, during a time a repulsion of the force generation device is reduced to near zero while an attraction of the force generation device is generated.

21. The holding apparatus according to claim 16 wherein

the force generation device generates a magnetic attraction as the attraction between the support device and the detection system.

22. The holding apparatus according to claim 21 wherein

the force generation device has a magnetic material member which is provided in at least one of a fixed portion of the support device and the detection system, and a magnet member provided in the other of the fixed portion and the detection system.

23. The holding apparatus according to claim 16 wherein

the force generation device includes a static gas bearing as a repulsion generation device which generates a repulsion between the support device and the detection system.

24. The holding apparatus according to claim 23 wherein

the static gas bearing is arranged on the detection system.

25. The holding apparatus according to claim 24 wherein

gas is supplied to the static gas bearing via a fixed portion of the support device on which the detection system is placed.

26. The holding apparatus according to claim 24 wherein

the static gas bearing is arranged at three places of a predetermined plane of the detection system that faces a fixed portion of the support device.

27. The holding apparatus according to claim 16 wherein

the force generation device has a plurality of permanent magnets arranged in the detection system as an attraction generation device which generates the attraction between the support device and the detection system and also has a plurality of air pads arranged in the detection system as a repulsion generation device which generates a repulsion between the support device and the detection system, whereby

a centroid of a figure which is formed by connecting positions of the plurality of permanent magnets and a centroid of a figure formed by connecting positions of the plurality of air pads substantially coincide with each other.

28. The holding apparatus according to claim 1 wherein

the support device includes a surface plate on which the detection system is placed on a surface side substantially parallel to the horizontal plane, and the force generation device can generate an attraction and a repulsion between the surface plate and the detection system.

29. The holding apparatus according to claim 28 wherein

the force generation device can adjust a magnitude of at least one of the attraction and the repulsion.

30. The holding apparatus according to claim 28 wherein

the clearance is maintained between the detection system and the surface plate by a balance of the attraction and the repulsion generated by the force generation device.

31. The holding apparatus according to claim 28 wherein

the detection system is placed on a lower surface side of the surface plate.

32. The holding apparatus according to claim 28 wherein

the force generation device includes an attraction generation device which generates the attraction between the surface plate and the detection system, and a repulsion generation device which generates the repulsion between the surface plate and the detection system.

33. The holding apparatus according to claim 28 wherein

the support device makes the clearance be approximately zero at a time when the detection system is fixed.

34. The holding apparatus according to claim 28 wherein

the attraction and repulsion generated between the surface plate and the detection system substantially act on the same position of the detection system.

35. The holding apparatus according to claim 28, further comprising:

a controller which controls the drive device to maintain a position of the detection system within a horizontal plane substantially constant, during a time the repulsion is reduced to near zero while the attraction of the force generation device is generated.

36. The holding apparatus according to claim 28 wherein

the force generation device generates a magnetic attraction as the attraction between the surface plate and the detection system.

37. The holding apparatus according to claim 36 wherein

the force generation device has a magnetic material member which is provided in at least one of a fixed portion of the support device and the detection system, and a magnet member provided in the other of the fixed portion and the detection system.

38. The holding apparatus according to claim 28 wherein

the force generation device includes a static gas bearing as a repulsion generation device which generates the repulsion between the surface plate and the detection system.

39. The holding apparatus according to claim 38 wherein

the static gas bearing is arranged on the detection system.

40. The holding apparatus according to claim 39 wherein

gas is supplied to the static gas bearing via a fixed portion of the support device on which the detection system is placed.

41. The holding apparatus according to claim 39 wherein

the static gas bearing is arranged at three places of a predetermined plane of the detection system that faces a fixed portion of the support device.

42. The holding apparatus according to claim 28 wherein

the force generation device has a plurality of permanent magnets arranged in the detection system as an attraction generation device which generates the attraction between the surface plate and the detection system and also has a plurality of air pads arranged in the detection system as a repulsion generation device which generates the repulsion between the surface plate and the detection system, whereby

a centroid of a figure which is formed by connecting positions of the plurality of permanent magnets and a centroid of a figure formed by connecting positions of the plurality of air pads substantially coincide with each other.

43. The holding apparatus according to claim 1, further comprising:

a restriction member which restricts movement of the detection system within the horizontal plane.

44. The holding apparatus according to claim 43 wherein

the restriction member includes a cam follower shaped stopper member.

45. The holding apparatus according to claim 1, further comprising:

a measurement system which measures positional information of the detection system within the horizontal plane.

46. The holding apparatus according to claim 45 wherein

the measurement system includes a linear encoder.

47. The holding apparatus according to claim 1 wherein

a fixed portion of the support device on which the detection system is arranged has a pipe line inside through which a cooling medium passes.

48. The holding apparatus according to claim 1 wherein

the drive device moves an optical system of the detection system, and makes a position of a detection area of the detection system variable.

49. A position detection apparatus comprising:

a detection system which detects a mark on an object; and

the holding apparatus according to claim 1 which movably holds the detection system.

50. An exposure apparatus that forms a pattern on a sensitive object by an irradiation of an energy beam, the apparatus comprising:

the position detection apparatus according to claim 49 which detects positional information of a mark on the sensitive object; and

a patterning device which irradiates the energy beam on the sensitive object using detection results by the position detection apparatus.

51. The exposure apparatus according to claim 50 wherein

the position detection apparatus has a plurality of detection systems which has at least one detection system moved by the drive device, and the plurality of detection systems detects positional information of the mark on the sensitive object.

52. The exposure apparatus according to claim 51 wherein

the drive device moves the at least one detection system so that different marks on the sensitive object can be simultaneously detected by at least two of the plurality of detection systems.

53. A device manufacturing method, the method including:

exposing a sensitive object using the exposure apparatus according to claim 50; and

developing the sensitive object which has been exposed.

54. An exposure method in which a pattern is formed on a sensitive object by an irradiation of an energy beam, the method comprising:

a detection process in which positional information of a mark of the sensitive object is detected, using a detection system which is movably held by the holding apparatus according to claim 1; and

a pattern formation process in which the energy beam is irradiated on the sensitive object using detection results, and a pattern is formed on the sensitive object.

55. The exposure method according to claim 54 wherein

a plurality of detection systems including at least one of the detection system is provided, and a mark of the sensitive object can be detected by the plurality of detection systems.

56. The exposure method according to claim 55 wherein

the at least one detection system is moved so that different marks on the sensitive object can be simultaneously detected by at least two of the plurality of detection systems.

57. A device manufacturing method, the method including:

exposing a sensitive object using the exposure method according to claim 54; and

developing the sensitive object which has been exposed.

58. A position detection apparatus which detects positional information of a mark on an object, the apparatus comprising:

a detection system which detects a mark on the object;

a force generation device which can generate an attraction and a repulsion between the detection system and a fixed portion; and

a drive device which drives the detection system at least uniaxially in the horizontal plane, in a state where a predetermined clearance is formed between the detection system and the fixed portion by the attraction and the repulsion generated by the force generation device.

59. The position detection apparatus according to claim 58 wherein

the force generation device can adjust a magnitude of at least one of the attraction and the repulsion.

60. The position detection apparatus according to claim 58 wherein

in the detection system, at least an optical system is supported by suspension by the fixed portion, and by the drive device moving the optical system, a position of a detection area of the detection system becomes variable.

61. An exposure apparatus that forms a pattern on a sensitive object by an irradiation of an energy beam, the apparatus comprising:

the position detection apparatus according to claim 58 which detects positional information of a mark on the sensitive object; and

a patterning device which irradiates the energy beam on the sensitive object using detection results by the position detection apparatus.

62. The exposure apparatus according to claim 61 wherein

the position detection apparatus has a plurality of detection systems which has at least one detection system moved by the drive device, and the plurality of detection systems detects positional information of the mark on the sensitive object.

63. The exposure apparatus according to claim 62 wherein

the drive device moves the at least one detection system so that different marks on the sensitive object can be simultaneously detected by at least two of the plurality of detection systems.

64. A device manufacturing method, the method including:

exposing a sensitive object using the exposure apparatus according to claim 61; and

developing the sensitive object which has been exposed.

65. A moving method to move a detection system which detects a mark on an object in a horizontal plane, the method comprising:

forming a predetermined clearance between the detection system and a fixed portion by an attraction and a repulsion generated between the detection system and the fixed portion; and

moving the detection system in a horizontal plane, while maintaining the clearance.

66. The moving method according to claim 65, further comprising:

fixing the detection system, which has been moved, to the fixed portion, by adjusting at least one of the attraction and the repulsion and reducing the clearance almost to zero.

67. The moving method according to claim 66 wherein

the repulsion is almost zero at a time when the detection system is fixed.

68. The moving method according to claim 65 wherein

in the detection system, at least an optical system is supported by suspension by the fixed portion, and by moving the optical system, a position of a detection area of the detection system becomes variable.

69. A position detection method in which positional information of a mark on an object is detected, the method comprising:

moving a detection system using the moving method according to claim 65; and

detecting a mark on the object by the detection system which has been moved.

70. An exposure method in which a pattern is formed on a sensitive object by an irradiation of an energy beam, the method comprising:

a detection process in which positional information of a mark on the sensitive object is detected by moving a detection system by the moving method according to claim 65; and

a pattern formation process in which the energy beam is irradiated on the sensitive object using detection results, and a pattern is formed on the sensitive object.

71. The exposure method according to claim 70 wherein

a plurality of detection systems including at least one of the detection system is provided, and a mark of the sensitive object can be detected by the plurality of detection systems.

72. The exposure method according to claim 71 wherein

the at least one detection system is moved so that different marks on the sensitive object can be simultaneously detected by at least two of the plurality of detection systems.

73. A device manufacturing method, the method including:

exposing a sensitive object using the exposure method according to claim 70; and

developing the sensitive object which has been exposed.