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Holding apparatus, position detection apparatus and exposure apparatus, moving method, position detection method, exposure method, adjustment method of detection system and device manufacturing method

  • US 8,432,534 B2
  • Filed: 05/07/2009
  • Issued: 04/30/2013
  • Est. Priority Date: 11/09/2006
  • Status: Active Grant
First Claim
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1. A holding apparatus that movably holds a detection system which detects a mark on an object, the apparatus comprising:

  • a support device which supports the detection system; and

    a drive device which drives the detection system supported via a predetermined clearance by the support device at least in a uniaxial direction in a horizontal plane, whereinthe support device includes a force generation device which generates an attraction and a repulsion between the support device and the detection system.

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