Active detection techniques for photoacoustic sensors

• US 8,434,366 B2
• Filed: 12/15/2010
• Issued: 05/07/2013
• Est. Priority Date: 12/15/2010
• Status: Active Grant

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Hung, Chih-Ming, Trombley, Django
• Primary Examiner(s): SAINT SURIN, JACQUES M
• Application Number:
  US12/969,160
• Publication Number:
  US 20120151994A1
• Time in Patent Office: 874 Days
• Field of Search: 736/43, 735/79, 736/45, 736/48, 736/49, 73/240.1, 73/240.2, 73/240.6
• US Class Current: 73/643
• CPC Class Codes: G01N 2021/1704 in gases
• CPC Class Codes: G01N 21/1702 with opto-acoustic detection, e.g. for gases or analysing solids
• CPC Class Codes: G01N 29/036 by measuring frequency or resonance of acoustic waves
• CPC Class Codes: G01N 29/2425 optoacoustic fluid cells therefor

Abstract

Traditional photoacoustic sensors generally operate in a passive mode, which can degrade the performance. Here, however, a photoacoustic sensor has been disclosed that operates an acoustic resonance chamber and a transducer in an active mode so as to avoid the problems associated with traditional photoacoustic sensors; in particular, because the acoustic resonance chamber operates at near atmospheric pressure such as 100'"'"'s Torr as opposed to 1 m Torr type of pressure for radio spectroscopy, the sensor is allowed to be scaled to operate on an integrated circuit or IC.

Claims

1. An apparatus comprising:

a transmitter that generates a modulated energy beam along an axis;

an acoustic resonance chamber that is generally coextensive with the axis and that receives the modulated energy beam;

an acoustic transducer that is placed in proximity to the acoustic resonance chamber;

drive circuitry that is electrically coupled to the transmitter, wherein the drive circuitry is configured to operate the acoustic resonance chamber based on the resonant frequency of the acoustic transducer operating in an active resonance mode; and

a detector that is electrically coupled to the acoustic transducer and the drive circuitry, wherein the detector detects the existence of resonance of the acoustic resonance chamber by detecting a change in the frequency or amplitude of an oscillator formed by the drive circuitry and the acoustic transducer.

2. The apparatus of claim 1, wherein the detector further comprises a frequency counter.

3. The apparatus of claim 1, wherein the detector further comprises a phase detector.

4. The apparatus of claim 1, wherein the detector further comprises a phase-locked loop (PLL).

5. The apparatus of claim 1, wherein the detector further comprises an analog-to-digital converter (ADC).

6. The apparatus of claim 1, wherein the transmitter further comprises:

an emitter that emits the modulated energy beam, wherein the oscillator gates the emitter at a gating frequency; and

a focusing member that is generally coextensive with the axis so as to focus the modulated energy beam.

7. The apparatus of claim 6, wherein the emitter further comprises a laser diode, and wherein the modulated energy beam further comprises a modulated laser beam.

8. The apparatus of claim 6, wherein the emitter further comprises an antenna that is adapted to emit RF radiation that generally matches a predetermined molecular resonant frequency, and wherein the focusing member further comprises a waveguide.

9. The apparatus of claim 6, wherein the detector is electrically coupled to the drive circuitry to control the gating frequency so that the gating frequency generally matches the resonant frequency of the acoustic resonance chamber.

10. The apparatus of claim 1, wherein the transmitter further comprises:

a frequency generator that generates frequencies at resonant frequencies of molecules of a gas sample;

the oscillator having the acoustic transducer and the drive circuitry as a negative resistance;

an emitter that is electrically coupled to the frequency generator and that emits the modulated energy beam, wherein the oscillator modules the frequency generator at a modulating frequency; and

a focusing member that is generally coextensive with the axis so as to focus the modulated energy beam.

11. The apparatus of claim 1, wherein the detector is electrically coupled to the drive circuitry to control an oscillating frequency formed by the transducer and the drive circuitry so that the modulating frequency generally matches the resonant frequency of the acoustic resonance chamber.

12. The apparatus of claim 1, wherein the detector is electrically coupled to the drive circuitry to control the resonance chamber so that the chamber resonance generally matches the resonant frequency of the acoustic transducer.

13. The apparatus of claim 1, wherein the drive circuitry further comprises:

a current source that is electrically coupled to the acoustic transducer; and

an NPN transistor that is electrically coupled to the current source at its collector and the acoustic transducer at its base.

14. The apparatus of claim 1, wherein the drive circuitry further comprises:

an inverting gain element that is electrically coupled between a first node and a second node;

a first resistor that is electrically coupled between the first node and the second node;

the acoustic transducer is electrically coupled between the first node and the second node;

a first capacitor that is coupled to the first node; and

a second capacitor that is coupled to the second node.

15. The apparatus of claim 13, wherein the first and second capacitors further comprise first and second variable capacitors.

16. The apparatus of claim 1, wherein the acoustic resonance chamber further comprises a tuning member that is adapted to adjust the resonant frequency of the acoustic resonant chamber.

17. An integrated circuit (IC) comprising:

a substrate;

a transmitter that is formed on the substrate and that is configured to generate a modulated energy beam along an axis;

an acoustic resonance chamber that is formed on the substrate, that is generally coextensive with the axis and that is configured to receive the modulated energy beam;

a transfer system that is formed on the substrate and that is in fluid communication with the acoustic resonance chamber, wherein the transfer system is configured to transfer fluid samples into the acoustic resonance chamber;

an acoustic transducer that is formed on the substrate and that is placed in proximity to the acoustic resonance chamber;

drive circuitry that is formed on the substrate and that is electrically coupled to the transmitter, wherein the drive circuitry is configured to operate the acoustic resonance chamber based on the resonant frequency of the acoustic transducer operating in an active resonance mode; and

a detector that is formed on the substrate and that is electrically coupled to the acoustic transducer and the drive circuitry, wherein the detector detects the existence of resonance of the acoustic resonance chamber by detecting a change in the frequency or amplitude of an oscillator formed by the drive circuitry and the acoustic transducer.

18. The IC of claim 17, wherein the detector further comprises a frequency counter.

19. The IC of claim 17, wherein the detector further comprises a phase detector.

20. The IC of claim 17, wherein the detector further comprises a PLL.

21. The IC of claim 17, wherein the detector further comprises an ADC.

22. The IC of claim 17, wherein the transmitter further comprises:

an emitter that emits the modulated energy beam, wherein the oscillator gates the emitter at a gating frequency; and

a focusing member that is generally coextensive with the axis so as to focus the modulated energy beam.

23. The IC of claim 22, wherein the emitter further comprises a laser diode, and wherein the modulated energy beam further comprises a modulated laser beam.

24. The IC of claim 22, wherein the emitter further comprises an antenna that is adapted to emit RF radiation that generally matches a predetermined molecular resonant frequency, and wherein the focusing member further comprises a waveguide.

25. The IC of claim 22, wherein the detector is electrically coupled to the drive circuitry to control the gating frequency so that the gating frequency generally matches the resonant frequency of the acoustic resonance chamber.

26. The IC of claim 17, wherein the transmitter further comprises:

a frequency generator that generates frequencies at resonant frequencies of molecules of a gas sample;

the oscillator having the acoustic transducer and the drive circuitry as a negative resistance;

an emitter that is electrically coupled to the frequency generator and that emits the modulated energy beam, wherein the oscillator modules the frequency generator at a modulating frequency; and

a focusing member that is generally coextensive with the axis so as to focus the modulated energy beam.

27. The IC of claim 17, wherein the detector is electrically coupled to the drive circuitry to control an oscillating frequency formed by the transducer and the drive circuitry so that the modulating frequency generally matches the resonant frequency of the acoustic resonance chamber.

28. The IC of claim 17, wherein the detector is electrically coupled to the drive circuitry to control the resonance chamber so that the chamber resonance generally matches the resonant frequency of the acoustic transducer.

29. The IC of claim 17, wherein the drive circuitry further comprises:

a current source that is electrically coupled to the acoustic transducer; and

an NPN transistor that is electrically coupled to the current source at its collector and the acoustic transducer at its base.

30. The IC of claim 17, wherein the drive circuitry further comprises:

an inverting gain element that is electrically coupled between a first node and a second node;

a first resistor that is electrically coupled between the first node and the second node;

the acoustic transducer is electrically coupled between the first node and the second node;

a first capacitor that is coupled to the first node; and

a second capacitor that is coupled to the second node.

31. The IC of claim 30, wherein the first and second capacitors further comprise first and second variable capacitors.

32. The IC of claim 17, wherein the acoustic resonance chamber further comprises a tuning member that is adapted to adjust the resonant frequency of the acoustic resonant chamber.

33. The IC of claim 17, wherein the acoustic transducer further comprises a microelectromechanical systems (MEMS) microphone.

34. The IC of claim 33, wherein transfer system further comprises:

an input port that is in fluid communication with the acoustic resonance chamber;

a first MEMS valve that is located between the input port and the acoustic resonance chamber;

a output port that is in fluid communication with the acoustic resonance chamber;

a second MEMS valve that is located between the output port and the acoustic resonance chamber; and

a MEMS pump that is in fluid communication with the output port.

35. The IC of claim 34, wherein the acoustic resonance chamber further comprises a tuning member that is adapted to adjust the resonant frequency of the acoustic resonant chamber.