Temperature and temperature distribution sensing with high resolution in microscopic electronic devices and biological objects

• US 8,434,939 B2
• Filed: 12/12/2007
• Issued: 05/07/2013
• Est. Priority Date: 12/22/2006
• Status: Expired due to Fees

• Current Assignee: Sony Deutschland GmbH (Sony Group Corp.)
• Original Assignee: Sony Deutschland GmbH (Sony Group Corp.)
• Inventors: Miteva, Tzenka, Nelles, Gabriele, Yasuda, Akio
• Primary Examiner(s): Smith, R. A.
• Application Number:
  US12/519,462
• Publication Number:
  US 20100008394A1
• Time in Patent Office: 1,973 Days
• Field of Search: 374/1, 374/137, 374/161, 374/E3.001, 374/E11.024, 374/E15.001
• US Class Current: 374/137
• CPC Class Codes: G01K 11/20 using thermoluminescent materials G01K11/32 takes precedence
• CPC Class Codes: G01K 2211/00 Thermometers based on nanotechnology
• CPC Class Codes: G01K 2213/00 Temperature mapping
• CPC Class Codes: G02B 21/0076 arrangements using fluorescence or luminescence

Abstract

The present invention relates to a method of measuring a temperature and/or temperature distribution at a resolution <1 &mgr; m in an object and to a device for performing such method, more particularly to a microscope for performing such method. The method comprises applying a molecular thermometer embedded in a matrix layer on an object, photoexciting the said molecular thermometer with a light source of said microscope and measuring emission of radiation from said molecular thermometer with two photodetectors of said microscope. A first intensity at a first wavelength is measured by said first detector, a second intensity at a second wavelength is measured by said second.detector, and a ratio of said intensities is calculated and used to determine a temperature with a calibrated curve. Said microscope is a confocal microscope or a stimulated emission depletion (STED) microscope.

Claims

1. A method of measuring a temperature and/or temperature distribution at a resolution <

1 μ

m in an object, such as an electronic device or a biological object, said method comprising;

a) providing an object,

b) applying a thermometer layer on said object or on a part of the surface of said object where a temperature and/or temperature distribution is to be measured, said thermometer layer comprising a matrix and a molecular thermometer having temperature dependent emission characteristics, said molecular thermometer being embedded in said matrix, said thermometer layer having a thickness in a range from 10 nm to 40 nm,

c) providing a microscope having a light source, a first detector, a second detector, and a microscopy stage for receiving and scanning a sample to be examined,

d) placing said object on said microscopy stage and using said light source to photoexcite said molecular thermometer,

e) measuring emission of radiation from said photoexcited molecular thermometer by measuring a luminescence intensity ratio using said first and said second detector, wherein said luminescent intensity ratio is the ratio of luminescent intensity at a first and second wave-length, wherein said first and said second detectors are used to measure a luminescence intensity at said first and second wavelengths, respectively, and

f) determining a temperature and/or temperature distribution based on said measured luminescence intensity ratio.

2. The method according to claim 1, wherein said microscope is a confocal microscope or a stimulated emission depletion (STED) microscope.

3. The method according to claim 1, wherein said molecular thermometer is selected from the group comprising metallo-porphyrins, other molecules having an inter-system crossing occur upon photoexcitation for >

1% of the excited singlet state(s), and metal-organic molecules having an inter-system crossing occur upon photoexcitation for >

1% of the excited singlet state(s).

4. The method according to claim 3, wherein said molecular thermometer is a metallo-porphyrin.

5. The method according to claim 4, wherein said metallo-porphyrin is selected from the group comprising zinc octaethyl porphyrin (ZnOEP), palladium octaethyl porphyrin (PdOEP), and platinum octaethyl porphyrin (PtOEP).

6. The method according to claim 3, wherein said other molecules have an inter-system crossing occur upon photoexcitation for >

50% of the excited singlet state(s).

7. The method according to claim 3, wherein said other molecules have an inter-system crossing occur upon photoexcitation for >

90% of the excited singlet state(s).

8. The method according to claim 3, wherein said metal-organic molecules have at least one of Ir, Pt, Ru, Pd, Zn, Fe, Au or Ag in a structure thereof.

9. The method according to claim 3, wherein said metal-organic molecules have an inter-system crossing occur upon photoexcitation for >

50% of the excited singlet state(s).

10. The method according to claim 3, wherein said metal-organic molecules have an inter-system crossing occur upon photoexcitation for >

90% of the excited singlet state(s).

11. The method according to claim 1, wherein said molecular thermometer is present in said thermometer layer at concentrations in a range from 0.001 to 5 wt. % referring to the total weight of said matrix.

12. The method according to claim 11, wherein said molecular thermometer is present in said thermometer layer at concentrations in a range from 0.01 to 3 wt. % referring to the total weight of said matrix.

13. The method according to claim 1, wherein said matrix is optically transparent.

14. The method according to claim 1, wherein said matrix is inert.

15. The method according to claim 1, wherein said matrix is optically transparent and inert.

16. The method according claim 15, wherein said optically transparent and inert matrix is a polymeric matrix.

17. The method according to claim 16, wherein said polymeric matrix is made of a material selected from the group comprising polystyrene, polymethylmethacrylate, polycarbonate, polysilicone, and polyolefine.

18. The method according to claim 17, wherein said polysilicone is poly(dimethylsiloxane) (PDMS), and said polyolefine is polyethylene or polypropylene.

19. The method according to claim 16, wherein said matrix contains inorganic oxide or nitride.

20. The method according to claim 1, wherein said matrix contains inorganic oxide or nitride.

21. The method according to claim 1, wherein the applying b) is performed by a method selected from the group comprising spin-coating, dip-coating, drop casting, doctor blading, Langmuir-Blodgett techniques, spraying, thermal evaporation, molecular beam deposition, lamination and adhering.

22. The method according to claim 1, wherein said thermometer layer is a multilayer structure and comprises at least two sublayers.

23. The method according to claim 22, wherein each sublayer has a different concentration of said molecular thermometer.

24. The method according to claim 1, wherein no molecular heater layer is applied on said object to determine a temperature and/or temperature distribution in said object.

25. The method according to claim 1, wherein, in the placing d), said photo-excitation is performed by continuous excitation or pulsed excitation.

26. The method according to claim 25, wherein said photoexcitation occurs in the wavelength range of 400-600 nm.

27. The method according to claim 1, further comprising a calibration step:

performing a calibration of said thermometer layer when applied to a substrate by

photoexciting said thermometer layer,

measuring a luminescence intensity ratio from said thermometer layer at at least two different temperatures,

measuring said at least two different temperatures using an external means for measuring said temperatures, and

correlating each measured luminescence ratio with its corresponding temperature,

wherein said calibration step is performed prior to the placing d) of photoexciting said molecular thermometer.

28. The method according to claim 1, further comprising a calibration step:

performing a calibration of said thermometer layer when applied to a substrate by

photoexciting said thermometer layer,

measuring a luminescence intensity ratio from said thermometer layer at at least two different temperatures,

measuring said at least two different temperatures using an external means for measuring said temperatures, and

correlating each measured luminescence ratio with its corresponding temperature,

wherein said calibration step is performed independently of any of the steps a)-f).

29. The method according to claim 1, wherein said luminescence intensity ratio is the ratio of a fluorescence intensity at said first wavelength to a phosphorescence intensity at said second wavelength.

30. The method according to claim 29, wherein said fluorescence intensity at said first wavelength includes a delayed fluorescence intensity.

31. The method according to claim 1, wherein said luminescence intensity ratio is the ratio of a fluorescence intensity of a singlet state of said molecular thermometer to a phosphorescence intensity from an excited triplet state of said molecular thermometer at said second wavelength (I_singlet/I_triplet).

32. The method according to claim 31, wherein said fluorescence intensity of said singlet state of said molecular thermometer includes a delayed fluorescence that follows a triplet-triplet-annihilation process at said first wavelength.

33. The method according to claim 1, wherein said molecular thermometer is PdOEP and said luminescence intensity ratio is I_549nm/I_662nm.

34. The method according to claim 1, wherein the resolution achieved is <

500 nm in a plane perpendicular to a light beam of said microscope, and <

500 nm in a direction along the light beam of said microscope.

35. The method according to claim 34, wherein the resolution achieved is <

300 nm in a plane perpendicular to the light beam of said microscope.

36. The method according to claim 34, wherein the resolution achieved is <

200 nm in a plane perpendicular to the light beam of said microscope.

37. The method according to claim 34, wherein the resolution achieved is <

100 nm in a plane perpendicular to the light beam of said microscope.

38. The method according to claim 34, wherein the resolution achieved is <

50 nm in a direction along the light beam of said microscope.

39. The method according to claim 34, wherein the resolution achieved is <

20 nm in a direction along the light beam of said microscope.

40. The method according to claim 34, wherein the resolution achieved is approximately 10 nm in a direction along the light beam of said microscope.

41. A microscope for performing the method according to claim 1, comprising:

said light source,

said first detector and said second detector that measures said luminescence intensity ratio, said luminescence originating from said molecular thermometer layer,

said microscopy stage that receives and scans said sample to be examined,

wherein said object having said thermometer layer applied thereon is placed on said microscopy stage and said thermometer layer gives rise to luminescence when photoexcited by a light beam from said light source.

42. The microscope according to claim 41, wherein the microscope is a confocal microscope or a stimulated emission depletion microscope (STED).

43. The microscope according to claim 41, wherein the light source is a laser, a laser diode, or a light emitting diode.