Fine laminar barrier protective layer

• US 8,435,650 B2
• Filed: 12/19/2005
• Issued: 05/07/2013
• Est. Priority Date: 12/17/2004
• Status: Expired due to Fees

• Current Assignee: Schott AG (Carl-Zeiss-Stiftung)
• Original Assignee: Schott AG (Carl-Zeiss-Stiftung)
• Inventors: Mehrtens, Andree, Hamel, Margareta, Moelle, Christoph, Kpper, Thomas
• Primary Examiner(s): LANGMAN, JONATHAN C
• Application Number:
  US11/721,802
• Publication Number:
  US 20090142524A1
• Time in Patent Office: 2,696 Days
• Field of Search: 428/188, 428/220, 428/426, 428/698, 428/702
• US Class Current: 428/698
• CPC Class Codes: C03C 17/245 by deposition from the vapour phase
• CPC Class Codes: C03C 2218/153 by plasma-enhanced cvd
• CPC Class Codes: C03C 2218/154 by sputtering
• CPC Class Codes: C03C 2218/345 Surface crystallisation
• CPC Class Codes: C03C 23/007 by thermal treatment
• CPC Class Codes: C23C 16/045 Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
• CPC Class Codes: C23C 16/45523 Pulsed gas flow or change of composition over time
• CPC Class Codes: Y10T 428/13 Hollow or container type article [e.g., tube, vase, etc.]
• CPC Class Codes: Y10T 428/131 Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
• CPC Class Codes: Y10T 428/24744 Longitudinal or transverse tubular cavity or cell

Abstract

In order to provide a thermostable and highly effective barrier coating on a substrate, and to protect the substrate against the effect of harmful gas components even at high temperatures, the invention provides a coated substrate comprising a barrier coating having a multiplicity of consecutive individual layers respectively of a kind differing from or similar to a neighboring individual layer, the individual layers exhibiting a layer thickness of respectively at most 50 nanometers.

Claims

1. A coated substrate defined by a coating having a multiplicity of consecutive individual layers respectively of a kind differing from or similar to a neighboring individual layer, the individual layers exhibiting a layer thickness of respectively at most 50 nanometers, wherein the substrate is a tube that is hot pinched after coating with the formation of a sealed cavity, wherein the coating comprises at least one partial layer packet having individual lavers of the same composition but different morphology.

2. The coated substrate as claimed in claim 1, wherein at least one of the individual layers exhibit a layer thickness of at most 10 nanometers.

3. The coated substrate as claimed in claim 1, wherein at least one of the individual layers exhibit a layer thickness of at most 2 nanometers.

4. The coated substrate as claimed in claim 1, wherein at least one individual layer of the coating differs from a neighboring individual layer in its chemical composition.

5. The coated substrate as claimed in claim 1, wherein at least one of the individual layers exhibits crystalline structure.

6. The coated substrate as claimed in claim 5, defined by a layer having a number of consecutive, similar crystalline layers.

7. The coated substrate as claimed in claim 1, wherein at least one individual layer of the coating differs from a neighboring individual layer in its morphology.

8. The coated substrate as claimed in claim 7, wherein the individual layer differs from a neighboring individual layer by its crystal structure.

9. The coated substrate as claimed in claim 1, wherein the individual layers differ from one another in their growth mode.

10. The coated substrate as claimed in claim 1, wherein at least one of the individual layers exhibits an amorphous or at least partially amorphous structure.

11. The coated substrate as claimed in claim 10, defined by a layer having a number of consecutive, similar, at least partially amorphous layers.

12. The coated substrate as claimed in claim 1, wherein the coating comprises at least one partial layer packet having alternating layers of a different nature.

13. The coated substrate as claimed in claim 1, wherein the coating comprises at least one partial layer packet having amorphous and neighboring, at least partially crystalline layers.

14. The coated substrate as claimed in claim 1, wherein the coating comprises at least one partial layer packet having two at least partially crystalline layers of a different composition, between which respectively one amorphous layer is arranged.

15. The coated substrate as claimed in claim 1, wherein the coating is transparent.

16. The coated substrate as claimed in claim 15, wherein the transparency of the coating corresponds to the transparency of the substrate.

17. The coated substrate as claimed in claim 15, wherein the light transmission through a coated substrate deviates in the visible spectral region by at most 5% from the transmission of a substrate without the coating.

18. The coated substrate as claimed in claim 1, defined by a transparent substrate.

19. The coated substrate as claimed in claim 1, wherein the refractive index of the coating corresponds to the refractive index of the substrate surface, or deviates therefrom by at most 5%.

20. The coated substrate as claimed in claim 1, defined by an antireflection layer system having the coating, the entire layer system acting in an antireflective fashion and at least one layer of the antireflection layer system comprising a partial layer packet that has a multiplicity of thin consecutive layers with an average thickness of the individual layers of at most 50 nanometers, and whose effective refractive index is dimensioned such that the antireflection layer system acts overall in an antireflective fashion.

21. The coated substrate as claimed in claim 1, wherein at least one of the individual layers contain inorganic oxides.

22. The coated substrate as claimed in claim 1, wherein at least one of the individual layers contains at least one of the oxides TiO₂, ZrO₂, SiO₂, Al₂O₃, Nb₂O₅, Ta₂O₅, HfO₂.

23. The coated substrate as claimed in claim 1, wherein the substrate comprises at least one of the materials of glass, glass ceramic, ceramic, metal, semiconductor, a crystalline material.

24. The coated substrate as claimed in claim 1, wherein the substrate is hollow.

25. The coated substrate as claimed in claim 24, wherein the substrate is internally coated.

26. The coated substrate as claimed in claim 1, wherein the substrate is tubular.

27. The coated substrate as claimed in claim 1, wherein the coating is catalytically active.

28. The coated substrate as claimed in claim 27, distinguished by titanium oxide-containing photocatalytically active individual layers.