Patterning electrode materials free from berm structures for thin film photovoltaic cells

• US 8,435,822 B2
• Filed: 12/07/2010
• Issued: 05/07/2013
• Est. Priority Date: 09/30/2008
• Status: Expired due to Fees

• Current Assignee: Stion Corporation
• Original Assignee: Stion Corporation
• Inventors: Wieting, Robert D.
• Primary Examiner(s): Lebentritt, Michael
• Application Number:
  US12/962,580
• Publication Number:
  US 20110073181A1
• Time in Patent Office: 882 Days
• Field of Search: 438/55, 438/62, 438/85, 438 95- 99, 257/21.007, 257/27, 257/158, 257/31.124
• US Class Current: 438/55
• CPC Class Codes: H01L 31/022425 for solar cells
• CPC Class Codes: H01L 31/0322 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
• CPC Class Codes: H01L 31/0392 including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate textured substrates H01L31/02366
• CPC Class Codes: H01L 31/03923 including AIBIIICVI compound materials, e.g. CIS, CIGS
• CPC Class Codes: H01L 31/046 PV modules composed of a plurality of thin film solar cells deposited on the same substrate
• CPC Class Codes: Y02E 10/541 CuInSe2 material PV cells

Abstract

A method for forming a thin film photovoltaic device having patterned electrode films includes providing a soda lime glass substrate with an overlying lower electrode layer comprising a molybdenum material. The method further includes subjecting the lower electrode layer with one or more pulses of electromagnetic radiation from a laser source to ablate one or more patterns associated with one or more berm structures from the lower electrode layer. Furthermore, the method includes processing the lower electrode layer comprising the one or more patterns using a mechanical brush device to remove the one or more berm structures followed by treating the lower electrode layer comprising the one or more patterns free from the one or more berm structures. The method further includes forming a layer of photovoltaic material overlying the lower electrode layer and forming a first zinc oxide layer overlying the layer of photovoltaic material.

Claims

1. A method comprising:

providing a substrate having an upper surface and an opposing lower surface;

forming a first electrode layer overlying the upper surface, the first electrode layer having a first thickness;

forming one or more patterns in the first electrode layer;

filling at least one pattern, from the one or more patterns, with a conductive material to form a first interconnect structure having a first height, wherein the first height is substantially equal to the first thickness;

forming a photovoltaic layer over the first electrode; and

forming a second electrode layer having a second thickness over the photovoltaic layer.

2. The method of claim 1 wherein the substrate comprises soda lime glass material.

3. The method of claim 1 wherein forming one or more patterns further comprises:

subjecting the first electrode layer to one or more pulses of electromagnetic radiation from a laser source; and

removing one or more portions of the first electrode layer to form the one or more patterns.

4. The method of claim 1 further comprising prior to forming the interconnect structure, processing the first electrode layer comprising the one or more patterns using a mechanical brush device to remove the one or more berm structures.

5. The method of claim 1 further comprising forming a second interconnect structure disposed in the second electrode layer.

6. The method of claim 1 further comprising forming a barrier layer overlying the upper surface of the substrate prior to forming the first electrode layer.

7. The method of claim 1 further comprising forming a window layer overlying the photovoltaic layer prior to forming the second electrode layer.

8. The method of claim 1 further comprising:

cleaning the upper surface of the substrate and the first electrode layer using a cleaning liquid; and

removing residual cleaning liquid including liquid droplets from the upper surface of the substrate and the first electrode layer using a gas knife configured to provide a facet profile of dry air with adjustable angles relative to the upper surface of the substrate.

9. The method of claim 1 further comprising forming a transparent oxide layer overlying the photovoltaic layer prior to forming the window layer.

10. The method of claim 1 wherein the first electrode layer comprises molybdenum.

11. The method of claim 1 wherein the second electrode layer comprises a transparent conductive oxide material.

12. The method of claim 1 wherein the photovoltaic layer comprises copper indium gallium diselenide (GIGS) material.