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System and method for detecting particles with a semiconductor device

  • US 8,436,289 B1
  • Filed: 07/28/2010
  • Issued: 05/07/2013
  • Est. Priority Date: 06/09/2008
  • Status: Active Grant
First Claim
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1. A device for detecting neutrons comprising:

  • a charge storage structure, the charge storage structure comprising,a first layer comprising boron-10 that reacts with a neutron producing an alpha particle and a lithium ion;

    a second layer located below the first layer and comprising silicon;

    a third layer located below the second layer and comprising a dielectric;

    a fourth layer located below the third layer, the fourth layer comprising a non-conductive material and a plurality of electrons giving the fourth layer a net negative charge;

    a fifth layer located below the fourth layer and comprising a dielectric; and

    a sixth layer located below the fifth layer and comprising silicon.

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