System and method for detecting particles with a semiconductor device

• US 8,436,289 B1
• Filed: 07/28/2010
• Issued: 05/07/2013
• Est. Priority Date: 06/09/2008
• Status: Active Grant

• Current Assignee: Infineon Technologies Batam PT (Infineon Technologies AG)
• Original Assignee: Spansion LLC (Infineon Technologies AG)
• Inventors: Hossain, Timothy Z., Clopton, Patrick Mark, Lyons, Christopher F., Fullwood, Clayton, Posey, Dan E., Goodwin, Greg Alan, Foster, Christopher Michael
• Primary Examiner(s): Legasse, Jr., Francis M
• Application Number:
  US12/844,888
• Time in Patent Office: 1,014 Days
• Field of Search: 250/208.1, 250/214.1, 250/214.R, 250/238, 250/239, 250/207, 250/214.VT, 25037009-37014, 2503381-3384, 378/98.11, 378/98.12
• US Class Current: 250/214.1
• CPC Class Codes: H01L 27/14609 Pixel-elements with integrated switching, control, storage or amplification elements scanning details of imagers (circuitry of solid-state image sensors H04N25/00); circuitry of imagers H04N25/70
• CPC Class Codes: H01L 27/1462 Coatings
• CPC Class Codes: H01L 27/14676 X-ray, gamma-ray or corpuscular radiation imagers measuring X-, gamma- or corpuscular radiation G01T1/00
• CPC Class Codes: H01L 31/118 of the surface barrier or shallow PN junction detector type, e.g. surface barrier alpha-particle detectors

Abstract

Systems and methods are described herein for detecting particles emitted by nuclear material. The systems comprise one or more semiconductor devices for detecting particles emitted from nuclear material. The semiconductor devices can comprise a charge storage element comprising several layers. A non-conductive charge storage layer enveloped on top and bottom by dielectric layers is mounted on a substrate. At least one top semiconductor layer can be placed on top of the top dielectric layer. A reactive material that reacts to particles, such as neutrons emitted from nuclear material, can be incorporated into the top semiconductor layer. When the reactive material reacts to a particle emitted from nuclear material, ions are generated that can alter the charge storage layer and enable detection of the particle.

Claims

1. A device for detecting neutrons comprising:

a charge storage structure, the charge storage structure comprising,

a first layer comprising boron-10 that reacts with a neutron producing an alpha particle and a lithium ion;

a second layer located below the first layer and comprising silicon;

a third layer located below the second layer and comprising a dielectric;

a fourth layer located below the third layer, the fourth layer comprising a non-conductive material and a plurality of electrons giving the fourth layer a net negative charge;

a fifth layer located below the fourth layer and comprising a dielectric; and

a sixth layer located below the fifth layer and comprising silicon.

2. The device of claim 1, wherein the plurality of electrons in the fourth layer are stored as a first group on a first side of the fourth layer and a second group on a second side of the fourth layer.

3. The device of claim 1, comprising a plurality of charge storage structures comprising an array capable of creating an image from detected neutrons.

4. The device of claim 1, wherein the first layer is within 0.85 micrometers of the fourth layer.

5. The device of claim 1, wherein there is a first electric field between the fourth layer and the second layer.

6. The device of claim 1, wherein there is a second electric field between the fourth layer and the sixth layer.

7. The device of claim 1, wherein the first layer has been enriched with boron-10.

8. The device of claim 1, wherein the net negative charge of the fourth layer changes in response to one of the alpha particle and the lithium ion.

9. A device for detecting a particle emitted from radioactive material comprising:

a charge storage structure, the charge storage structure comprising,

a first layer comprising a reactive material that reacts with the particle and produces at least one ion;

a second layer located below the first layer and comprising silicon;

a third layer located below the second layer and comprising a non-conductive material;

a fourth layer located below the third layer, the fourth layer comprising a non-conductive material and a plurality of electrons giving the fourth layer a net negative charge;

a fifth layer located below the fourth layer and comprising a non-conductive material; and

a sixth layer located below the fifth layer and comprising silicon.

10. The device of claim 9, wherein the plurality of electrons in the fourth layer are stored as a first group on a first side of the fourth layer and a second group on a second side of the fourth layer.

11. The device of claim 9, comprising a plurality of charge storage structures comprising an array capable of creating an image from detected particles.

12. The device of claim 9, wherein there is a first electric field between the fourth layer and the second layer.

13. The device of claim 9, wherein there is a second electric field between the fourth layer and the sixth layer.

14. The device of claim 9, wherein the first layer is within 0.85 micrometers of the fourth layer.

15. The device of claim 9, wherein the net negative charge of the fourth layer changes in response to the ion.