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Wafer stage

  • US 8,436,631 B2
  • Filed: 06/12/2009
  • Issued: 05/07/2013
  • Est. Priority Date: 06/12/2009
  • Status: Active Grant
First Claim
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1. A wafer stage, comprising:

  • a platform for supporting a wafer such that a backside of the wafer is suspended above a cavity of the platform;

    a support structure disposed substantially within the cavity, wherein an opening is formed in the support structure;

    a support element disposed around the opening formed in the support structure, a top surface of the support element for supporting a portion of the wafer, wherein the top surface of the support element has one or more cavities; and

    a vacuum suction means incorporated in the support element, the vacuum suction means enabling at least partial air evacuation of the one or more cavities of the support substrate that are in contact with the portion of the wafer,wherein the wafer stage is adapted for relative movement of the platform with respect to the support structure for alignment of the wafer with respect to a probe.

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