MEMS-based tunable filter

• US 8,436,698 B2
• Filed: 11/02/2009
• Issued: 05/07/2013
• Est. Priority Date: 11/02/2009
• Status: Active Grant

• Current Assignee: Harris Corporation (L3Harris Technologies, Inc.)
• Original Assignee: Harris Corporation (L3Harris Technologies, Inc.)
• Inventors: Rogers, John E.
• Primary Examiner(s): Summons, Barbara
• Application Number:
  US12/610,735
• Publication Number:
  US 20110102105A1
• Time in Patent Office: 1,282 Days
• Field of Search: 333/167, 333/174, 333/185, 333/186, 310/309, 257/307, 257/532, 257/595, 257/312, 438/381, 438/386, 438/393
• US Class Current: 333/186
• CPC Class Codes: H01G 5/145 with profiled electrodes
• CPC Class Codes: H03H 2007/008 the MEMS being trimmable
• CPC Class Codes: H03H 7/01 Frequency selective two-port networks
• CPC Class Codes: H03H 7/1775 Parallel LC in shunt or branch path H03H7/1791 takes precedence

Abstract

A filter device is provided including a substrate (302) and a plurality of horizontal gap closing actuator (GCA) devices (550) disposed on a first surface of the substrate. The plurality of GCA devices includes and one or more GCA varactors (700). Each one of the plurality of horizontal GCA devices includes at least one drive comb structure (602a, 602b, 702a, 702b), at least one input/output (I/O) comb structure (616a, 676b, 716a, 716b), and at least one truss comb structure (604, 704) interdigitating the drive comb and the I/O comb structures. The truss comb structure is configured to move along a motion axis between at least a first interdigitated position and a second interdigitated position based on a bias voltage applied between the truss comb structure and the drive comb structure.

Claims

1. A filter device, comprising:

a substrate;

a plurality of horizontal gap closing actuator (GCA) devices disposed on a first surface of said substrate, said plurality of GCA devices comprising one or more GCA varactors,

wherein each one of said plurality of horizontal GCA devices comprises at least one drive comb structure, at least one input/output (I/O) comb structure, and at least one truss comb structure interdigitating said drive comb and said I/O comb structures, said truss comb structure configured to move along a motion axis between a first interdigitated position and at least a second interdigitated position based on a bias voltage applied between said truss comb structure and said drive comb structure;

wherein an interdigital spacing between said truss comb structure and each of said I/O comb structure and said drive comb structure is approximately the same in at least a first one of said horizontal GCA devices in which said I/O comb structure is configured as part of a varactor, and is different in at least a second one of said horizontal GCA devices to facilitate electrical contact between said I/O comb structure and said truss comb structure, whereby said second one of said horizontal GCA devices is configured to function as a switch; and

wherein at least said first one of said horizontal GCA devices comprises a stopper configured to limit an amount of motion of said truss comb structure and prevent at least said interdigital spacing between said truss comb structure and said I/O comb structure from going to zero.

2. The device of claim 1, wherein said plurality of horizontal GCA devices are coupled to at least one inductive element formed on said substrate.

3. The device of claim 2, wherein said inductive element comprises:

at least a first electrically conductive element disposed on said first surface of said substrate;

at least a second electrically conductive element disposed on said first surface of said substrate; and

at least one electrically conductive via extending through said substrate and shorting said first and said second electrically conductive elements to ground.

4. The device of claim 1, wherein said plurality of horizontal GCA devices are coupled to at least one planar inductive element disposed on said first surface.

5. The device of claim 1, wherein said plurality of horizontal GCA devices are coupled to provide one among a T-type filter, a π

-type filter, and a capacitively coupled series filter.

6. The device of claim 1, wherein each one of said plurality of horizontal GCA devices further comprises at least one fixed end structure and one or more reed structures for springingly coupling said truss comb structure to said fixed end structure.

7. The device of claim 1, wherein said first and said second interdigitated positions in at least a first and a second of said GCA varactors are different.

8. A filter device, comprising:

a substrate;

a plurality of horizontal gap closing actuator (GCA) devices disposed on a first surface of said substrate, said plurality of GCA devices comprising one or more GCA varactors;

at least one electrically conductive via extending through said substrate and electrically coupled to at least a portion of said plurality of horizontal GCA devices; and

at least one electrically conductive ground plane layer disposed on a bottom surface of said substrate, said ground plane layer electrically coupled to said electrically conductive via;

wherein each one of said plurality of horizontal GCA devices comprises at least one drive comb structure, at least one input/output (I/O) comb structure, and at least one truss comb structure interdigitating said drive comb and said I/O comb structures, said truss comb structure configured to move along a motion axis between a first interdigitated position and at least a second interdigitated position based on a bias voltage applied between said truss comb structure and said drive comb structure.

9. A filter device, comprising:

a substrate;

a plurality of horizontal gap closing actuator (GCA) devices disposed on a first surface of said substrate, said plurality of GCA devices comprising one or more GCA varactors;

a plurality of fixed capacitive elements, each one of said plurality of fixed capacitive elements electrically coupled in series with one of said GCA varactors and having a capacitance value less than a lowest capacitance value of said associated one of said GCA varactors;

wherein each one of said plurality of horizontal GCA devices comprises at least one drive comb structure, at least one input/output (I/O) comb structure, and at least one truss comb structure interdigitating said drive comb and said I/O comb structures, said truss comb structure configured to move along a motion axis between a first interdigitated position and at least a second interdigitated position based on a bias voltage applied between said truss comb structure and said drive comb structure.

10. A filter bank, comprising:

a substrate;

one or more filter elements coupled to a common input node and a common output node, each of said filter elements comprising a plurality of horizontal gap closing actuator (GCA) devices disposed on a first surface of said substrate, said plurality of GCA devices comprising one or more GCA varactors,

wherein each one of said plurality of horizontal GCA devices comprises at least one drive comb structure, at least one input/output (I/O) comb structure, and at least one truss comb structure interdigitating said drive comb and said I/O comb structures, said truss comb structure configured to move along a motion axis between at least a first interdigitated position and a second interdigitated position based on a bias voltage applied between said truss comb structure and said drive comb structure;

wherein an interdigital spacing between said truss comb structure and each of said I/O comb structure and said drive comb structure is approximately the same in at least a first one of said horizontal GCA devices in which said I/O comb structure is configured as part of a varactor, and is different in at least a second one of said horizontal GCA devices to facilitate electrical contact between said I/O comb structure and said truss comb structure, whereby said second one of said horizontal GCA devices is configured to function as a switch; and

wherein at least said first one of said horizontal GCA devices comprises a stopper configured to limit an amount of motion of said truss comb structure and prevent at least said interdigital spacing between said truss comb structure and said I/O comb structure from going to zero.

11. The filter bank of claim 10, wherein at least one of said plurality of horizontal GCA devices is coupled to at least one inductive element disposed on said substrate.

12. The filter bank of claim 10, wherein each one of said plurality of horizontal GCA devices further comprises at least one fixed end structure and one or more reed structures for springingly coupling said truss comb structure to said fixed end structure.

13. A filter bank, comprising:

a substrate;

one or more filter elements coupled to a common input node and a common output node, each of said filter elements comprising a plurality of horizontal gap closing actuator (GCA) devices disposed on a first surface of said substrate, said plurality of GCA devices comprising one or more GCA varactors and at least one GCA switch;

a first common control node coupled to said GCA switch in at least two of said filter elements;

wherein each one of said plurality of horizontal GCA devices comprises at least one drive comb structure, at least one input/output (I/O) comb structure, and at least one truss comb structure interdigitating said drive comb and said I/O comb structures, said truss comb structure configured to move along a motion axis between at least a first interdigitated position and a second interdigitated position based on a bias voltage applied between said truss comb structure and said drive comb structure;

wherein said first and said second interdigitated positions for said GCA switch in said two of said filter elements are different.

14. The filter bank of claim 13, further comprising:

a second common control node coupled to at least two of said GCA varactors in said filter elements, and

wherein said first and said second interdigitated positions for said at least two of said GCA varactors coupled to said second common node are different.

15. A filter bank, comprising:

a substrate;

one or more filter elements coupled to a common input node and a common output node, each of said filter elements comprising a plurality of horizontal gap closing actuator (GCA) devices disposed on a first surface of said substrate, said plurality of GCA devices comprising one or more GCA varactors; and

a plurality of fixed capacitive elements, each one of said plurality of fixed capacitive elements associated with one of said GCA varactors and having a capacitance value less than a lowest capacitance value of said associated one of said GCA varactors;

wherein each one of said plurality of horizontal GCA devices comprises at least one drive comb structure, at least one input/output (I/O) comb structure, and at least one truss comb structure interdigitating said drive comb and said I/O comb structures, said truss comb structure configured to move along a motion axis between at least a first interdigitated position and a second interdigitated position based on a bias voltage applied between said truss comb structure and said drive comb structure.

16. A method of manufacturing a filter device, comprising:

providing a substrate comprising a stack of layers, said stack comprising at least one base layer, at least one release layer on said base layer, and at least one structure layer on said release layer;

depositing at least one electrically conductive layer on said structure layer; and

forming a plurality of voids in said electrically conductive layer, said structure layer, and said release layer,

wherein said plurality of voids define a plurality of patterned regions, said plurality of patterned regions defining a plurality of horizontal gap closing actuator (GCA) devices comprising one or more GCA varactors, each of said plurality of GCA devices comprising at least one drive comb structure, at least one input/output (I/O) comb structure, and at least one truss comb structure interdigitating said drive comb and said I/O comb structures, said plurality of voids in said release layer extending beneath said truss comb structure to allow said truss comb structure to move along a motion axis between at least a first interdigitated position and a second interdigitated position.

17. A method of manufacturing a filter device, comprising:

providing a substrate comprising a stack of layers, said stack comprising at least one base layer, at least one release layer on said base layer, and at least one structure layer on said release layer;

depositing at least one electrically conductive layer on said structure layer; and

forming a plurality of voids in said electrically conductive layer, said structure layer, and said release layer;

wherein said plurality of voids define a plurality of patterned regions, said plurality of patterned regions defining a plurality of horizontal gap closing actuator (GCA) devices comprising one or more GCA varactors, each of said plurality of GCA devices comprising at least one drive comb structure, at least one input/output (I/O) comb structure, and at least one truss comb structure interdigitating said drive comb and said I/O comb structures, said plurality of voids in said release layer extending beneath said truss comb structure to allow said truss comb structure to move along a motion axis between at least a first interdigitated position and a second interdigitated position; and

wherein said forming further comprises selecting said plurality of voids to further define for each one of said plurality of horizontal GCA devices at least one fixed end structure and one or more reed structures for springingly coupling to said truss comb structure to said fixed end structure.

18. A method of manufacturing a filter device, comprising:

providing a substrate comprising a stack of layers, said stack comprising at least one base layer, at least one release layer on said base layer, and at least one structure layer on said release layer;

depositing at least one electrically conductive layer on said structure layer; and

forming a plurality of voids in said electrically conductive layer, said structure layer, and said release layer;

wherein said plurality of voids define a plurality of patterned regions, said plurality of patterned regions defining a plurality of horizontal gap closing actuator (GCA) devices comprising one or more GCA varactors, each of said plurality of GCA devices comprising at least one drive comb structure, at least one input/output (I/O) comb structure, and at least one truss comb structure interdigitating said drive comb and said I/O comb structures, said plurality of voids in said release layer extending beneath said truss comb structure to allow said truss comb structure to move along a motion axis between at least a first interdigitated position and a second interdigitated position; and

wherein said forming further comprises selecting said plurality of voids to provide different first and said second interdigitated positions in at least a first and a second of said GCA varactors.

19. A method of manufacturing a filter device, comprising:

providing a substrate comprising a stack of layers, said stack comprising at least one base layer, at least one release layer on said base layer, and at least one structure layer on said release layer;

depositing at least one electrically conductive layer on said structure layer; and

forming a plurality of voids in said electrically conductive layer, said structure layer, and said release layer;

wherein said plurality of voids define a plurality of patterned regions, said plurality of patterned regions defining a plurality of horizontal gap closing actuator (GCA) devices comprising one or more GCA varactors, each of said plurality of GCA devices comprising at least one drive comb structure, at least one input/output (I/O) comb structure, and at least one truss comb structure interdigitating said drive comb and said I/O comb structures, said plurality of voids in said release layer extending beneath said truss comb structure to allow said truss comb structure to move along a motion axis between at least a first interdigitated position and a second interdigitated position; and

wherein said forming further comprises defining one or more GCA switches and selecting said plurality of voids to provide different first and said second interdigitated positions in at least a first and a second of said GCA switches.

20. A method of manufacturing a filter device, comprising:

providing a substrate comprising a stack of layers, said stack comprising at least one base layer, at least one release layer on said base layer, and at least one structure layer on said release layer;

depositing at least one electrically conductive layer on said structure layer;

forming a plurality of voids in said electrically conductive layer, said structure layer, and said release layer, wherein

said plurality of voids define a plurality of patterned regions,

said plurality of patterned regions defining a plurality of horizontal gap closing actuator (GCA) devices comprising one or more GCA varactors,

each of said plurality of GCA devices comprising at least one drive comb structure, at least one input/output (I/O) comb structure, and at least one truss comb structure interdigitating said drive comb and said I/O comb structures,

said plurality of voids in said release layer extending beneath said truss comb structure to allow said truss comb structure to move along a motion axis between at least a first interdigitated position and a second interdigitated position; and

forming a plurality of fixed capacitive elements, each one of said plurality fixed capacitive elements associated with one of said GCA varactors and having a capacitance value less than a lowest capacitance value of said associated one of said GCA varactors.