System and method for integrated inductor
First Claim
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1. An inductor comprising:
- a substrate;
a conductor disposed above the substrate; and
a seamless ferromagnetic material surrounding at least a first portion of the conductor,wherein the substrate surrounds a gap extending from a top surface of the substrate through a bottom surface of the substrate, and the seamless ferromagnetic material fills the gap.
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Abstract
In one embodiment, an inductor has a substrate, a conductor disposed above the substrate and a seamless ferromagnetic material surrounding at least a first portion of the conductor.
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Citations
29 Claims
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1. An inductor comprising:
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a substrate; a conductor disposed above the substrate; and a seamless ferromagnetic material surrounding at least a first portion of the conductor, wherein the substrate surrounds a gap extending from a top surface of the substrate through a bottom surface of the substrate, and the seamless ferromagnetic material fills the gap. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An inductor comprising:
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a semiconductor substrate; a conductor disposed within a trench in the semiconductor substrate; and a seamless ferromagnetic material surrounding at least a first portion of the conductor, wherein the substrate surrounds a first gap extending from a top surface of the semiconductor substrate through a bottom surface of the substrate, and the seamless ferromagnetic material fills the first gap. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. An circuit component comprising:
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a semiconductor substrate; a conductor disposed within a trench in a semiconductor substrate, the conductor comprising a first portion forming at least one loop; a gap disposed within the semiconductor substrate within the at least one loop, the gap spanning from a top surface of the semiconductor substrate to a bottom surface of the semiconductor substrate; and a seamless ferromagnetic material filling the gap and surrounding at least the first portion of the conductor. - View Dependent Claims (26, 27, 28, 29)
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Specification