Interferometric modulator array with integrated MEMS electrical switches

• US 8,437,071 B2
• Filed: 06/20/2012
• Issued: 05/07/2013
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Chui, Clarence
• Primary Examiner(s): CHOI, WILLIAM C
• Application Number:
  US13/528,609
• Publication Number:
  US 20120256819A1
• Time in Patent Office: 321 Days
• Field of Search: 359/198.1, 359/224.1, 359/230, 359/247, 359290-292, 345/85, 345598-600, 356/454
• US Class Current: 359/290
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G09G 2300/0473 Use of light emitting or modulating elements having two or more stable states when no power is applied
• CPC Class Codes: G09G 2300/06 Passive matrix structure, i.e. with direct application of both column and row voltages to the light emitting or modulating elements, other than LCD or OLED
• CPC Class Codes: G09G 2310/0267 Details of drivers for scan electrodes, other than drivers for liquid crystal, plasma or OLED displays
• CPC Class Codes: G09G 2310/0275 Details of drivers for data electrodes, other than drivers for liquid crystal, plasma or OLED displays, not related to handling digital grey scale data or to communication of data to the pixels by means of a current
• CPC Class Codes: G09G 2330/021 Power management, e.g. power saving
• CPC Class Codes: G09G 3/3466 based on interferometric effect
• CPC Class Codes: Y10T 29/49002 Electrical device making
• CPC Class Codes: Y10T 29/49105 Switch making

Abstract

An array of display elements, such as interferometric modulators, is integrated with collapsible cavity microelectromechanical system (MEMS) electrical switches. The electrical switches and the display elements may be at least partially formed with the same manufacturing operations. The switches may form row or column select functions for the display elements.

Claims

1. A display device comprising:

a microelectromechanical system (MEMS) display portion having rows and columns of MEMS elements; and

a plurality of MEMS switches formed as one or more additional rows or columns of additional MEMS elements adjacent to the MEMS elements of the display portion, wherein each MEMS switch is configured to selectively electrically connect one of the rows or one of the columns of the display portion to another circuit and to electrically tri-state the one row or column.

2. The device of claim 1, wherein the plurality of MEMS switches forms in part row or column select circuitry.

3. The device of claim 1, wherein the pitch of the MEMS switches substantially matches the pitch of the MEMS elements of the display portion.

4. The device of claim 1, wherein the MEMS switches and the MEMS elements of the display portion include collapsible cavities.

5. The device of claim 1, wherein the MEMS elements of the display portion each include an interferometric cavity.

6. The device of claim 1, wherein the MEMS switches and the MEMS elements of the display portion are at least partially formed with the same manufacturing operations.

7. The device of claim 1, wherein each MEMS switch includes a first terminal connected to one of the rows or one of the columns, a second terminal configured to be connected to another circuit, and a conductive strip configured to move between at least first and second positions.

8. The device of claim 7, wherein the conductive strip is electrically connected to the first and second terminals when in the first position.

9. The device of claim 8, wherein the conductive strip is electrically disconnected from the first and second terminals when in the second position.

10. The device of claim 1, wherein the MEMS switches are disposed adjacent to the display portion.

11. The device of claim 1, further comprising:

a processor that is in electrical communication with the display portion, the processor being configured to process image data; and

a memory device in electrical communication with the processor.

12. The device of claim 11, further comprising:

a driver circuit configured to send at least one signal to the display portion; and

a controller configured to send at least a portion of the image data to the driver circuit.

13. The device of claim 11, further comprising an image source module configured to send the image data to the processor.

14. The device of claim 13, wherein the image source module comprises at least one of a receiver, transceiver, and transmitter.

15. The device of claim 11, further comprising an input device configured to receive input data and to communicate the input data to the processor.

16. A method of manufacturing a display device, the method comprising:

forming a microelectromechanical system (MEMS) display portion comprising rows and columns of MEMS elements; and

forming a plurality of MEMS switches as one or more additional rows or columns of additional MEMS elements adjacent to the MEMS elements of the display portion, wherein each MEMS switch is configured to selectively electrically connect one of the rows or one of the columns of the display portion to another circuit and to electrically tri-state the one row or column.

17. The method of claim 16, wherein the plurality of MEMS switches forms in part row or column select circuitry.

18. The method of claim 16, wherein the pitch of the MEMS switches matches the pitch of the MEMS elements of the display portion.

19. The method of claim 16, wherein the MEMS switches and the MEMS elements of the display portion include collapsible cavities.

20. The method of claim 16, wherein the MEMS elements of the display portion each include an interferometric cavity.

21. The method of claim 16, wherein the MEMS switches and the MEMS elements of the display portion are at least partially formed with the same manufacturing operations.

22. The method of claim 16, wherein forming the plurality of MEMS switches includes forming a first terminal connected to one of the rows or one of the columns, forming a second terminal configured to be connected to another circuit, and forming a conductive strip configured to move between at least first and second positions.

23. The method of claim 22, wherein the conductive strip is electrically connected to the first and second terminals when in the first position.

24. The method of claim 23, wherein the conductive strip is electrically disconnected from the first and second terminals when in the second position.