Coated article with low-E coating including IR reflecting layer(s) and corresponding method
First Claim
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1. A method of making a heat treated coated article comprising a coating supported by a glass substrate, the method comprising:
- sputter-depositing a first dielectric layer comprising silicon nitride over at least the glass substrate;
sputter-depositing a first layer comprising zinc oxide over at least the layer comprising silicon nitride, the first layer comprising zinc oxide thickness from 40-150 Å
;
sputter-depositing a first infrared (IR) reflecting layer comprising silver over and contacting the first layer comprising zinc oxide;
sputter-depositing a second dielectric layer comprising silicon nitride on the glass substrate over at least the first IR reflecting layer;
sputter-depositing a second layer comprising zinc oxide over at least the first IR reflecting layer and the first and second dielectric layers comprising silicon nitride, the second layer comprising zinc oxide having a thickness of from 40-150 Å
;
sputter-depositing a second IR reflecting layer comprising silver over and contacting the second layer comprising zinc oxide;
sputter-depositing a layer comprising an oxide of NiCr over and contacting the second IR reflecting layer by sputtering a target comprising NiCr in an atmosphere comprising at least argon gas and a significant amount of oxygen gas, so that the layer comprising the oxide of NiCr is an oxide as it is sputter-deposited on the substrate;
sputter-depositing a third layer comprising zinc oxide over and contacting the layer comprising the oxide of NiCr;
depositing another dielectric layer located over at least the third layer comprising zinc oxide;
wherein, following said depositing steps, the layer comprising the oxide of NiCr is fully oxidized; and
heat treating the coated article after the aforesaid layers have been deposited on the glass substrate, so that when measured monolithically following heat treatment the coated article has a visible transmission of at least 80%, a sheet resistance (Rs) of less than or equal to 2.5 ohms/square, and a normal emissivity (E) of less than or equal to about 0.04.
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Abstract
A coated article is provided that may be heat treated in certain example embodiments. A coating of the coated article includes a zinc oxide inclusive layer located over and contacting a contact layer that is in contact with an infrared (IR) reflecting layer of a material such as silver. It has been found that the use of such a zinc oxide inclusive layer results in improved thermal stability upon heat treatment, increased visible transmission, and/or lower sheet resistance (Rs).
55 Citations
8 Claims
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1. A method of making a heat treated coated article comprising a coating supported by a glass substrate, the method comprising:
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sputter-depositing a first dielectric layer comprising silicon nitride over at least the glass substrate; sputter-depositing a first layer comprising zinc oxide over at least the layer comprising silicon nitride, the first layer comprising zinc oxide thickness from 40-150 Å
;sputter-depositing a first infrared (IR) reflecting layer comprising silver over and contacting the first layer comprising zinc oxide; sputter-depositing a second dielectric layer comprising silicon nitride on the glass substrate over at least the first IR reflecting layer; sputter-depositing a second layer comprising zinc oxide over at least the first IR reflecting layer and the first and second dielectric layers comprising silicon nitride, the second layer comprising zinc oxide having a thickness of from 40-150 Å
;sputter-depositing a second IR reflecting layer comprising silver over and contacting the second layer comprising zinc oxide; sputter-depositing a layer comprising an oxide of NiCr over and contacting the second IR reflecting layer by sputtering a target comprising NiCr in an atmosphere comprising at least argon gas and a significant amount of oxygen gas, so that the layer comprising the oxide of NiCr is an oxide as it is sputter-deposited on the substrate; sputter-depositing a third layer comprising zinc oxide over and contacting the layer comprising the oxide of NiCr; depositing another dielectric layer located over at least the third layer comprising zinc oxide; wherein, following said depositing steps, the layer comprising the oxide of NiCr is fully oxidized; and heat treating the coated article after the aforesaid layers have been deposited on the glass substrate, so that when measured monolithically following heat treatment the coated article has a visible transmission of at least 80%, a sheet resistance (Rs) of less than or equal to 2.5 ohms/square, and a normal emissivity (E) of less than or equal to about 0.04. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification