Vapor based combinatorial processing
First Claim
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1. A method of combinatorially processing a substrate, the method comprising:
- flowing a fluid volume over a surface of the substrate, the fluid volume comprising multiple portions, each of the multiple portions comprising different components in order to concurrently expose adjacent segregated regions of the substrate to different portions of the fluid volume, the flowing further comprising;
facilitating radially axisymmetric nonreversing flow configured around a central axis of the substrate, wherein the central axis is perpendicular to a plane of the substrate, for the fluid volume over the surface of the substrate while maintaining a substantially uniform conductance around a periphery of the substrate; and
,generating differently processed segregated regions by depositing varied material layers in the adjacent segregated regions through repetition of the flowing,wherein flowing further includes directing, toward the surface, a first flow of a carrier fluid and a second flow of a precursor fluid with relative flow rates of the first and second flows being established to substantially equilibrate pressure of respective different portions in the fluid volume.
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Abstract
A combinatorial processing chamber and method are provided. In the method a fluid volume flows over a surface of a substrate with differing portions of the fluid volume having different constituent components to concurrently expose segregated regions of the substrate to a mixture of the constituent components that differ from constituent components to which adjacent regions are exposed. Differently processed segregated regions are generated through the multiple flowings.
398 Citations
19 Claims
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1. A method of combinatorially processing a substrate, the method comprising:
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flowing a fluid volume over a surface of the substrate, the fluid volume comprising multiple portions, each of the multiple portions comprising different components in order to concurrently expose adjacent segregated regions of the substrate to different portions of the fluid volume, the flowing further comprising; facilitating radially axisymmetric nonreversing flow configured around a central axis of the substrate, wherein the central axis is perpendicular to a plane of the substrate, for the fluid volume over the surface of the substrate while maintaining a substantially uniform conductance around a periphery of the substrate; and
,generating differently processed segregated regions by depositing varied material layers in the adjacent segregated regions through repetition of the flowing, wherein flowing further includes directing, toward the surface, a first flow of a carrier fluid and a second flow of a precursor fluid with relative flow rates of the first and second flows being established to substantially equilibrate pressure of respective different portions in the fluid volume. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of depositing material on a substrate, the method comprising:
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flowing process fluids over a surface of the substrate so as to expose adjacent segregated regions of the opposed surface to radially axisymmetric nonreversing flow portions configured around a central axis of the substrate, wherein the central axis is perpendicular to a plane of the substrate, of the flowing process fluids while maintaining a substantially uniform conductance around a periphery of the substrate, wherein the substantially uniform conductance establishes a flow velocity that maintains the isolation of the radially axisymmetric flow portions; and
establishing conditions in an atmosphere proximate to the surface of at least one of the regions to deposit, from the process fluids, the material on the substrate andwherein flowing further includes directing, toward the surface of the substrate, a first flow of a carrier gas and a second flow containing a precursor with respective pressures being substantially equal between the first and second flows to maintain isolation of the flow portions, wherein different flow portions are comprised of different materials. - View Dependent Claims (16, 17, 18, 19)
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Specification