System for isolating an exposure apparatus

• US 8,441,615 B2
• Filed: 08/27/2009
• Issued: 05/14/2013
• Est. Priority Date: 09/04/2008
• Status: Active Grant

• Current Assignee: Nikon Research Corporation Of America (Nikon Corporation)
• Original Assignee: Nikon Corporation
• Inventors: Hashemi, Fardad A., Watson, Douglas C., Margeson, Christopher
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US12/548,895
• Publication Number:
  US 20100053589A1
• Time in Patent Office: 1,356 Days
• Field of Search: 355/53, 355 72- 76, 285/226, 138/121, 248/562
• US Class Current: 355/72
• CPC Class Codes: F16F 15/06 with metal springs with rubber springs also F16F15/08
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

A precision assembly (10) for fabricating a substrate (42) includes a precision fabrication apparatus (12), a pedestal assembly (14) and a suspension system (16). The precision fabrication apparatus (12) fabricates the substrate (42). The pedestal assembly (14) supports at least a portion of the fabrication apparatus (12). The suspension system (16) inhibits the transfer of motion between the mounting base (20) and the pedestal assembly (14). The suspension system (16) can include (i) a first boom (380) that is coupled to the mounting base (20) and the pedestal assembly (14), the first boom (380) being pivotable coupled to at least one of the mounting base (20) and the pedestal assembly (14), and (ii) a first resilient assembly (382) that is coupled between the mounting base (20) and at least one of the first boom (380) and the pedestal assembly (14). The first resilient assembly (382) can function similar to a zero length spring over an operational range of the resilient assembly (382). With this design, the components of the precision fabrication apparatus (12) are better protected by the suspension system (16) during a seismic disturbance. This reduces the likelihood of damage and misalignment of the components of the precision fabrication apparatus (12) during the seismic disturbance.

Claims

1. An isolation system for inhibiting the transfer of motion between a first object and a second object, the isolation system comprising:

a pedestal assembly on which the first object is mounted; and

a suspension assembly coupling the pedestal assembly and the second object, the suspension assembly supporting the pedestal assembly with substantially zero stiffness, the suspension assembly including a positive stiffness resilient mechanism and a negative stiffness resilient mechanism.

2. The isolation system of claim 1 wherein the negative stiffness resilient mechanism includes (i) a boom connector that is fixedly secured to the first object;

(ii) a boom that pivotably cantilevers from the boom connector, the boom being adapted to be coupled to the second object;

(iii) a movable mount that is movable relative to the boom connector; and

(iv) a boom resilient assembly that is coupled between the movable mount and the boom.

3. The isolation system of claim 1 wherein the suspension system includes (i) a first mount that is coupled to the first object;

(ii) a second mount that is coupled to the second object;

(iii) a first subassembly that inhibits movement of the first mount from being transferred to the second mount, the first subassembly including a first boom that pivotably cantilevers from the first mount, and a first resilient member that is coupled between the first mount and the first boom; and

(iv) a second subassembly that inhibits movement of the first mount from being transferred to the second mount, the second resilient subassembly including a second boom that pivotably cantilevers from one of the mounts, and a second resilient member that is coupled between one of the mounts and the second boom.

4. The isolation system of claim 1 wherein the suspension assembly includes (i) a first mount that is secured to the first object;

(ii) a first support that is secured to the second object; and

(iii) a mechanism that couples the first mount to the first support, the mechanism inhibiting the transfer of motion along a first axis and along a second axis, and the mechanism defining a LaCoste type system and a garden gate type assembly.

5. The isolation system of claim 4 wherein the LaCoste type system is secured to the first mount, and wherein the garden gate type assembly extends between and hingeably connects the LaCoste type system and the first support.

6. The isolation system of claim 1 wherein the pedestal assembly includes a first pedestal and a second pedestal, and wherein the suspension assembly includes a first suspension that is coupled between the mounting base and the first pedestal and a second suspension that is coupled between the mounting base and the second pedestal, and further comprising a pedestal synchronization system that causes the first pedestal to move approximately together with the second pedestal during a disturbance which exceeds a predetermined tolerance.

7. The precision assembly of claim 1 wherein the first object includes an exposure apparatus that transfers an image to a substrate, the exposure apparatus being mounted to the pedestal assembly.

8. The isolation system of claim 1 wherein the negative stiffness resilient mechanism is a passive, negative stiffness resilient mechanism.

9. The precision assembly of claim 8 wherein the suspension system inhibits the transfer of motion between the mounting base and the pedestal assembly, the suspension system including (i) a first boom that is coupled to the mounting base and the pedestal assembly, the first boom being pivotably coupled to at least one of the mounting base and the pedestal assembly, and (ii) a first resilient assembly that is coupled between the mounting base and at least one of the first boom and the pedestal assembly.

10. The precision assembly of claim 9 wherein the first resilient assembly includes a piston cylinder and a piston that is movable relative to the piston cylinder.

11. The precision assembly of claim 9 wherein the suspension system includes (i) a second boom that is coupled to the mounting base and the pedestal assembly, the second boom being pivotably coupled to at least one of the mounting base and the pedestal assembly, and (ii) a second resilient assembly that is coupled between the mounting base and at least one of the second boom and the pedestal assembly.

12. The precision assembly of claim 9 wherein the suspension system includes a movable mount that movably couples the first resilient assembly to the mounting base, a boom connector that pivotably connects the boom to the mounting base, and a mount resilient assembly that maintains the movable mount spaced apart from the boom connector.

13. The precision assembly of claim 9 wherein the precision manufacturing apparatus is an exposure apparatus that is adapted to transfer the image to the substrate, the exposure apparatus includes a plurality of first level components and a plurality of second level components;

and wherein the pedestal assembly includes a first pedestal level, and a spaced apart second pedestal level that are fixedly secured together so that movement of one of the pedestal levels results in movement of the other pedestal level, the first pedestal level supporting the first level components, and the second pedestal level supporting the second level components, wherein one of the pedestal levels is at least partly positioned above the other pedestal level.

14. The precision assembly of claim 9 further comprising a locking assembly for selectively securing the pedestal assembly in a first direction along a first axis to the mounting base, the locking assembly comprising (i) a lock beam that is coupled to one of the pedestal assembly and the mounting base, the lock beam including a first beam side and an opposed second beam side;

and (ii) a lock sub-assembly that selectively retains the lock beam, the lock sub-assembly including (i) a lock base that is coupled to one of the pedestal assembly and the mounting base, (ii) a first beam engager that is movable between a locked position in which the first beam engager engages the first beam side, and an unlocked position in which the first beam engager allows the first beam side to move relative to the first beam engager, (iii) a second beam engager that is movable between the locked position in which the second beam engager engages the second beam side, and the unlocked position in which the second beam engager allows the second beam side to move relative to the second beam engager, (iv) a first connector assembly that movable connects the first beam engager to the lock base so that the first beam engager can be moved between the locked position and the unlocked position, and (v) a second connector assembly that movable connects the second beam engager to the lock base so that the second beam engager can be moved between the locked position and the unlocked position;

wherein the connector assemblies are oriented so that when the beam engagers are engaging the lock beam, movement of the lock beam in the first direction along the first axis urges the beam engagers towards each other.

15. The precision assembly of claim 9 wherein the precision fabrication apparatus includes an exposure apparatus that transfers an image to the substrate, the exposure apparatus being mounted to the pedestal assembly.

16. A method of making a wafer including the steps of providing a substrate, and transferring an image to the substrate with the precision assembly of claim 15.

17. A precision assembly for fabricating a substrate, the precision assembly being supported by a mounting base, the precision assembly comprising a precision fabrication apparatus adapted for fabricating the substrate, and the isolation system of claim 1 that supports at least a portion of the precision fabrication apparatus.

18. A method for inhibiting the transfer of motion between a first object and a second object, the method comprising the steps of:

mounting the first object onto a pedestal assembly; and

coupling the pedestal assembly to the second object with a suspension assembly that supports the pedestal assembly with substantially zero stiffness, the step of coupling including the steps of coupling the pedestal assembly to the second object with a positive stiffness resilient mechanism, and coupling the pedestal assembly to the second object with a passive, negative stiffness resilient mechanism.

19. The method of claim 18 wherein the step of coupling includes the steps of (i) coupling a first mount to the first object;

(ii) coupling a second mount to the second object;

(iii) inhibiting movement of the first mount from being transferred to the second mount with a first subassembly, the first subassembly including a first boom that pivotably cantilevers from the first mount, and a first resilient member that is coupled between the first mount and the first boom; and

(iv) inhibiting movement of the first mount from being transferred to the second mount with a second subassembly, the second resilient subassembly including a second boom that pivotably cantilevers from one of the mounts, and a second resilient member that is coupled between one of the mounts and the second boom.

20. The method of claim 18 wherein the step of coupling includes the steps of (i) securing a first mount to the first object;

(ii) securing a first support to the second object; and

(iii) coupling the first mount to the first support with a mechanism that inhibits the transfer of motion along a first axis and along a second axis, and the mechanism defining a LaCoste type system and a garden gate type assembly.

21. The method of claim 18 wherein the pedestal assembly includes a first pedestal and a second pedestal, and wherein the suspension assembly includes a first suspension that is coupled between the mounting base and the first pedestal and a second suspension that is coupled between the mounting base and the second pedestal, and wherein the method includes the step of causing the first pedestal to move approximately together with the second pedestal during a disturbance which exceeds a predetermined tolerance with a pedestal synchronization system.

22. An isolation system for inhibiting the transfer of motion between a first object and a second object, the isolation system comprising:

a pedestal assembly on which the first object is mounted; and

a suspension assembly coupling the pedestal assembly and the second object, the suspension assembly supporting the pedestal assembly with substantially zero stiffness, the suspension assembly including a positive stiffness resilient mechanism and a negative stiffness resilient mechanism; and

wherein the negative stiffness resilient mechanism includes (i) a boom connector that is fixedly secured to the first object;

(ii) a boom that pivotably cantilevers from the boom connector, the boom being adapted to be coupled to the second object;

(iii) a movable mount that is movable relative to the boom connector; and

(iv) a boom resilient assembly that is coupled between the movable mount and the boom.

23. The isolation system of claim 22 wherein the boom resilient assembly functions substantially similar to a zero-length spring over an operational range of the boom first resilient assembly.

24. The isolation system of claim 23 further comprising a mount resilient assembly that maintains the movable mount spaced apart from the boom connector.

25. An isolation system for inhibiting the transfer of motion between a first object and a second object, the isolation system comprising:

a pedestal assembly on which the first object is mounted; and

a suspension assembly coupling the pedestal assembly and the second object, the suspension assembly supporting the pedestal assembly with substantially zero stiffness, wherein the suspension system includes (i) a first mount that is coupled to the first object;

(ii) a second mount that is coupled to the second object;

(iii) a first subassembly that inhibits movement of the first mount from being transferred to the second mount, the first subassembly including a first boom that pivotably cantilevers from the first mount, and a first resilient member that is coupled between the first mount and the first boom; and

(iv) a second subassembly that inhibits movement of the first mount from being transferred to the second mount, the second resilient subassembly including a second boom that pivotably cantilevers from one of the mounts, and a second resilient member that is coupled between one of the mounts and the second boom.

26. The isolation system of claim 25 wherein the first boom includes a boom distal end that is mechanically coupled to the second mount;

wherein the second boom is pivotably connected to the first mount, and the second resilient member is coupled between the first mount and the second boom; and

wherein each resilient member functions similar to a zero length spring over an operation range, each of the subassemblies is a LaCoste type system, and the first and second subassemblies are arranged in parallel.

27. An isolation system for inhibiting the transfer of motion between a first object and a second object, the isolation system comprising:

a pedestal assembly on which the first object is mounted, the pedestal assembly including a first pedestal and a second pedestal;

a suspension assembly coupling the pedestal assembly and the second object, the suspension assembly supporting the pedestal assembly with substantially zero stiffness, the suspension assembly including a first suspension that is coupled between a mounting base and the first pedestal and a second suspension that is coupled between the mounting base and the second pedestal; and

a pedestal synchronization system that causes the first pedestal to move approximately together with the second pedestal during a disturbance which exceeds a predetermined tolerance.

28. The isolation system of claim 27 wherein the pedestal synchronization system includes a pedestal lock assembly that selectively locks the first pedestal to the second pedestal.

29. The isolation system of claim 27 wherein the pedestal synchronization system includes a pedestal mover assembly that causes the first pedestal to move approximately together with the second pedestal during a seismic event.

30. A method for inhibiting the transfer of motion between a first object and a second object, the method comprising the steps of:

mounting the first object onto a pedestal assembly; and

coupling the pedestal assembly to the second object with a suspension assembly that supports the pedestal assembly with substantially zero stiffness, the step of coupling including the steps of (i) coupling a first mount to the first object;

(ii) coupling a second mount to the second object;

(iii) inhibiting movement of the first mount from being transferred to the second mount with a first subassembly, the first subassembly including a first boom that pivotably cantilevers from the first mount, and a first resilient member that is coupled between the first mount and the first boom; and

(iv) inhibiting movement of the first mount from being transferred to the second mount with a second subassembly, the second resilient subassembly including a second boom that pivotably cantilevers from one of the mounts, and a second resilient member that is coupled between one of the mounts and the second boom.

31. A method for inhibiting the transfer of motion between a first object and a second object, the method comprising the steps of:

mounting the first object onto a pedestal assembly, the pedestal assembly including a first pedestal and a second pedestal;

coupling the pedestal assembly to the second object with a suspension assembly that supports the pedestal assembly with substantially zero stiffness, the suspension assembly including a first suspension that is coupled between a mounting base and the first pedestal and a second suspension that is coupled between the mounting base and the second pedestal; and

causing the first pedestal to move approximately together with the second pedestal during a disturbance which exceeds a predetermined tolerance with a pedestal synchronization system.