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Laser beam profile measurement

  • US 8,441,625 B2
  • Filed: 03/02/2011
  • Issued: 05/14/2013
  • Est. Priority Date: 03/02/2011
  • Status: Expired due to Fees
First Claim
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1. A method for characterizing a profile of a laser beam, said method comprising:

  • disposing a laser target having a surface substantially perpendicular to an incident direction, said surface being reflective at a wavelength corresponding to the laser beam;

    moving said surface along a travel direction substantially parallel to said surface;

    directing a laser emitter to emit the laser beam at said surface along said incident direction;

    measuring a reflection from said surface, said reflection representing a plurality of intensities having a distribution of positions along said surface and during a temporal interval, andaveraging said plurality of intensities over said temporal interval for each position of said distribution to produce an analyzed beam profile, wherein each said position corresponds to a speed along said travel direction based on movement of said surface.

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