Temperature-robust MEMS gyroscope with 2-DOF sense-mode addressing the tradeoff between bandwith and gain

• US 8,443,667 B2
• Filed: 02/12/2009
• Issued: 05/21/2013
• Est. Priority Date: 02/21/2008
• Status: Active Grant

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Trusov, Alexander, Schofield, Adam, Shkel, Andrei
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US12/918,284
• Publication Number:
  US 20100319451A1
• Time in Patent Office: 1,559 Days
• Field of Search: 735/041.2, 735/041.4
• US Class Current: 73/504.12
• CPC Class Codes: B23Q 17/00 Arrangements for observing, indicating or measuring on machine tools for automatic control or regulation of feed movement, cutting velocity or position of tool or work B23Q15/00
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: Y10T 29/49764 with testing or indicating
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

The current invention is a novel gyroscope design, which yields devices robust to fabrication and environmental variations, allows flexible selection of operational parameters, and provides increased bandwidth with minimized sacrifice in gain regardless of the selected frequency of operation. The gyroscope has a single degree-of-freedom (DOF) drive-mode and a 2-DOF sense-mode. The drive-mode operational frequency and the sense-mode bandwidth can be selected arbitrarily in the proposed design, relaxing the tradeoff between the gain, die size, and detection capacitance. The symmetry of the structure ensures the optimal location of the drive-mode resonance relative to the sense-mode operational region, even in presence of fabrication imperfections.

Claims

1. A 3-degree of freedom (DOF) dynamic gyroscopic system comprising:

an outer frame;

a central anchor;

a detection mass coupled to the central anchor and to a proof mass disposed around the detection mass;

a 1-DOF drive subsystem comprising a pair of drive-mode shuttles;

a 2-DOF sense subsystem comprising a pair of sense-mode shuttles; and

a suspension subsystem,

wherein the suspension subsystem comprises a first plurality of springs coupling the drive subsystem to the outer frame and to the proof mass and a second plurality of springs coupling the sense subsystem to the outer frame and to the proof mass.

2. The 3-DCF dynamic gyroscope system of claim 1 where the drive subsystem, sense subsystem and suspension subsystem comprises

wherein each drive-mode and sense-mode shuttle is constrained to translate only along its respective x or y axis.

3. The 3-DOF dynamic gyroscope system of claim 2 where the first plurality of springs coupling the two drive-mode shuttles and the second plurality of springs coupling the two sense-mode shuttles to the outer frame and to the proof mass are uni-directional springs.

4. The 3-DOF dynamic gyroscope system of claim 2 further comprising:

the proof mass being suspended in the x-y plane by the suspension subsystem;

the proof mass being driven by the drive subsystem along the x-axis to form a z-axis-rotation-sensitive element; and

the detection mass being constrained by the suspension subsystem to y-axis deflections.

5. The 3-DOF dynamic gyroscope system of claim 2 where in the sense direction, the proof mass and the detection mass form the coupled 2-DOF sense subsystem,

wherein during rotation of the proof mass, the proof mass generates a y-axis Coriolis force, and

wherein the y-axis constrained detection mass absorbs the Coriolis force from the proof mass and efficiently responds in a wide band formed by two coupled resonant peaks.

6. The 3-DOF dynamic gyroscopic system of claim 5 where the detection mass further comprises a plurality of capacitors to detect the oscillations induced by the Coriolis force of the proof mass.

7. The 3-DOF dynamic gyroscopic system of claim 2 where each drive-mode shuttle and each se e-mode shuttle further comprise a plurality of capacitive electrodes for the actuation, detection, and control of the proof mass in the x and y directions.

8. The 3-DOF dynamic gyroscope system of claim 1 where the suspension subsystem comprises means for defining a sense-mode bandwidth by two resonant peaks and the frequency region in between in order to achieve optimal gain-bandwidth characteristics.

9. The 3-DOF dynamic gyroscopic system of claim 8 wherein the suspension subsystem couples the drive subsystem and the sense subsystem symmetrically to the proof mass to automatically and optimally place an operational frequency between the sense-mode bandwidth peak spacing of the gyroscope.

10. The 3-DOF dynamic gyroscopic system of claim 1 further comprising wherein the ratio of the mass of the detection mass to the sum of the mass of the pair of drive mode shuttles is less than one in order to provide an increased gain and sensitivity depending on a predetermined value of the mass ratio of the proof mass and the detection mass.

11. The 3-DOF dynamic gyroscopic system of claim 1 where the gyroscope is adapted for use as an angular rate sensor for camera stabilization, personal navigation, global positioning system augmentation, and electronic stability control in automobiles.