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Mechanical resonating structures and methods

  • US 8,446,078 B2
  • Filed: 03/26/2010
  • Issued: 05/21/2013
  • Est. Priority Date: 03/26/2009
  • Status: Active Grant
First Claim
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1. A device comprising:

  • a body;

    a substantially rectangular mechanical resonating structure comprising two opposing sides and configured to support in-plane Lamb wave vibration in a direction substantially parallel to the two opposing sides; and

    a multi-element anchor coupling the mechanical resonating structure to the body and connected to a side of the mechanical resonating structure, the multi-element anchor comprising a flexible element that is flexible in a direction perpendicular to a direction of vibration of the mechanical resonating structure.

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