Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing method
First Claim
1. An inspection device for inspecting a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually, said inspection device comprising:
- a Fourier transform optical system which is arranged optically downstream the spatial light modulator and which forms a Fourier transform plane optically in a Fourier transform relation with an array plane where the plurality of optical elements are arrayed;
a photodetector having a detection surface arranged on or near the Fourier transform plane; and
an inspection unit which inspects optical characteristics of the plurality of optical elements, based on a result of detection by the photodetector.
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Abstract
An inspection device is for inspecting a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually. The inspection device includes a Fourier transform optical system which is arranged optically downstream the spatial light modulator and which forms a Fourier transform plane optically in a Fourier transform relation with an array plane where the plurality of optical elements are arrayed, a photodetector having a detection surface arranged on or near the Fourier transform plane, and an inspection unit which inspects optical characteristics of the plurality of optical elements, based on a result of detection by the photodetector.
93 Citations
18 Claims
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1. An inspection device for inspecting a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually, said inspection device comprising:
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a Fourier transform optical system which is arranged optically downstream the spatial light modulator and which forms a Fourier transform plane optically in a Fourier transform relation with an array plane where the plurality of optical elements are arrayed; a photodetector having a detection surface arranged on or near the Fourier transform plane; and an inspection unit which inspects optical characteristics of the plurality of optical elements, based on a result of detection by the photodetector. - View Dependent Claims (2, 3)
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4. An inspecting method for inspecting a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually, said inspecting method comprising:
inspecting optical characteristics of the plurality of optical elements, based on a light intensity distribution formed on a Fourier transform plane optically in a Fourier transform relation with an array plane where the plurality of optical elements are arrayed, by light having traveled via the plurality of optical elements. - View Dependent Claims (5, 6, 7)
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8. An illumination optical system comprising:
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a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually, the illumination optical system illuminating an illumination target surface with light from a light source; a distribution forming optical system which forms a predetermined light intensity distribution on an illumination pupil of the illumination optical system, with the light having traveled via the spatial light modulator; and an inspection device, the inspection device comprising; a Fourier transform optical system which is arranged optically downstream the spatial light modulator and which forms a Fourier transform plane optically in a Fourier transform relation with an array plane where the plurality of optical elements are arrayed; a photodetector having a detection surface arranged on or near the Fourier transform plane; and an inspection unit which inspects optical characteristics of the plurality of optical elements, based on a result of detection by the photodetector. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. An illumination optical system which illuminates an illumination target surface with a light from a light source, the illumination optical system comprising:
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a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually; a distribution forming optical system which comprises a condensing optical system and an optical integrator and which forms a predetermined light intensity distribution on an illumination pupil of the illumination optical system, with the light that has travelled via the spatial light modulator; a splitting optical member which is arranged in an optical path between the spatial light modulator and the distribution forming optical system and which splits part of the light that has traveled via the spatial light modulator; a Fourier transform optical system which is arranged in an optical path of the light split by the splitting optical member and which forms a Fourier transform plane of a plane where the plurality of optical elements are arrayed; a photodetector having a detection surface arranged on or near the Fourier transform plane; and an inspection unit which inspects optical characteristics of the plurality of optical elements, based on a result of detection by the photodetector. - View Dependent Claims (16, 17, 18)
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Specification