High precision capacitors
First Claim
1. A capacitor structure, comprising:
- a) an insulating substrate selected from the group consisting of a polyimide, a glass/polymer laminate, or a high temperature polymer;
b) a first metal capacitor electrode thereon;
c) a thin insulating layer on at least part of said first metal capacitor electrode, said thin insulating layer having a substantially uniform thickness of from 3 Å
to 200 Å and
a predetermined breakdown voltage;
d) a bulk insulating layer over said first capacitor electrode, said bulk insulating layer having a first opening therein;
e) a second capacitor electrode on said thin insulating layer in said first opening and on or over said thin insulating layer and said bulk insulating layer outside said first opening, wherein a portion of said second capacitor electrode outside said first opening forms a bulk capacitor having an area at least 1 order of magnitude greater than an area of the first opening;
f) a third insulating layer on said second capacitor electrode and said second insulating layer;
g) an antenna on said third insulating layer, said antenna electrically connected to each of said first metal capacitor electrode and said second capacitor electrode.
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Accused Products
Abstract
High precision capacitors and methods for forming the same utilizing a precise and highly conformal deposition process for depositing an insulating layer on substrates of various roughness and composition. The method generally comprises the steps of depositing a first insulating layer on a metal substrate by atomic layer deposition (ALD); (b) forming a first capacitor electrode on the first insulating layer; and (c) forming a second insulating layer on the first insulating layer and on or adjacent to the first capacitor electrode. Embodiments provide an improved deposition process that produces a highly conformal insulating layer on a wide range of substrates, and thereby, an improved capacitor.
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Citations
48 Claims
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1. A capacitor structure, comprising:
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a) an insulating substrate selected from the group consisting of a polyimide, a glass/polymer laminate, or a high temperature polymer; b) a first metal capacitor electrode thereon; c) a thin insulating layer on at least part of said first metal capacitor electrode, said thin insulating layer having a substantially uniform thickness of from 3 Å
to 200 Å and
a predetermined breakdown voltage;d) a bulk insulating layer over said first capacitor electrode, said bulk insulating layer having a first opening therein; e) a second capacitor electrode on said thin insulating layer in said first opening and on or over said thin insulating layer and said bulk insulating layer outside said first opening, wherein a portion of said second capacitor electrode outside said first opening forms a bulk capacitor having an area at least 1 order of magnitude greater than an area of the first opening; f) a third insulating layer on said second capacitor electrode and said second insulating layer; g) an antenna on said third insulating layer, said antenna electrically connected to each of said first metal capacitor electrode and said second capacitor electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 46, 47, 48)
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24. A capacitor structure, comprising:
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a) a metal substrate selected from the group consisting of foils and sheets of stainless steel, molybdenum, copper and aluminum; b) a thin insulating layer on at least part of said metal substrate, said thin insulating layer having a substantially uniform thickness of from 3 Å
to 200 Å and
a predetermined breakdown voltage;c) a bulk insulating layer on or in contact with said thin insulating layer, said bulk insulating layer having an opening therein and a thickness greater than that of the thin insulating layer; d) a capacitor electrode on said thin insulating layer in said first opening and on or over (i) at least a part of said thin insulating layer and (ii) at least a part of said bulk insulating layer outside said first opening, wherein a portion of said capacitor electrode outside said first opening forms a bulk capacitor; and e) a conductive layer on a third insulating layer, electrically coupled to said capacitor electrode and said metal substrate; wherein said capacitor structure is configured to apply a voltage across said thin insulating layer, said voltage being less than said predetermined breakdown voltage when said capacitor structure is in an electric field configured to detect a surveillance or identification tag, and equal to or greater than said predetermined breakdown voltage when said capacitor structure is in said electric field configured to deactivate said surveillance or identification tag. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45)
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Specification