Mode synthesizing atomic force microscopy and mode-synthesizing sensing

• US 8,448,261 B2
• Filed: 03/17/2010
• Issued: 05/21/2013
• Est. Priority Date: 03/17/2010
• Status: Active Grant

• Current Assignee: University of Tennessee Research Foundation (University of Tennessee), UT-Battelle LLC
• Original Assignee: University of Tennessee Research Foundation (University of Tennessee), UT-Battelle LLC
• Inventors: Passian, Ali, Thundat, Thomas George, Tetard, Laurene
• Primary Examiner(s): Berman, Jack
• Assistant Examiner(s): OSENBAUGH-STEWART, ELIZA W
• Application Number:
  US12/726,083
• Publication Number:
  US 20110231965A1
• Time in Patent Office: 1,161 Days
• Field of Search: 850 36- 38, 850/50
• US Class Current: 850/37
• CPC Class Codes: G01Q 60/24 AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
• CPC Class Codes: G01Q 60/32 AC mode
• CPC Class Codes: G01Q 60/36 DC mode
• CPC Class Codes: G01Q 60/363 Contact-mode AFM
• CPC Class Codes: G01Q 90/00 Scanning-probe techniques or apparatus not otherwise provided for

Abstract

A method of analyzing a sample that includes applying a first set of energies at a first set of frequencies to a sample and applying, simultaneously with the applying the first set of energies, a second set of energies at a second set of frequencies, wherein the first set of energies and the second set of energies form a multi-mode coupling. The method further includes detecting an effect of the multi-mode coupling.

Claims

1. An analysis system comprising:

a sample;

a first excitation source that applies to a sample a first set of energies at a first set of frequencies;

a second excitation source, independent of said first excitation source, that applies a second set of energies at a second set of frequencies to a probe, wherein said first set of energies and said second set of energies are simultaneously applied to said sample and said probe, respectively, and form a multi-mode coupling effect; and

a detector that detects dynamics of said probe from which an effect of said multi-mode coupling effect can be obtained.

2. The analysis system of claim 1, wherein said first excitation source is a first vibrational source that applies first vibrational energies to said sample, and wherein said second excitation source is a second vibrational source that applies second vibrational energies to said probe.

3. The analysis system of claim 2, wherein said probe comprises a first electrically conductive component and wherein a second electrically conductive element is attached to said sample, wherein said first electrically conductive component and said second electrically conductive component are in electrical communication with a common power supply so as to create an analysis system where electrostatic forces are predominant.

4. The analysis system of claim 2, further comprising a light source that generates light that is applied to said sample, wherein said applied light affects an amplitude and phase of said multi-mode coupling effect.

5. The analysis system of claim 1, wherein said first excitation source is a first electromagnetic energy source that applies first electromagnetic fields to said sample, and wherein said second excitation source is a second electromagnetic energy source that applies second electromagnetic fields to said probe.

6. The analysis system of claim 5, wherein said probe comprises an electrically conductive component that generates said second electromagnetic fields and an electrically conductive element is attached to said sample, wherein said electrically conductive element generates said first electromagnetic fields.

7. The analysis system of claim 1, wherein said second excitation source is a first vibrational source that applies vibrational energies to said probe, and wherein said first excitation source is an electromagnetic energy source that applies electromagnetic fields to said sample.

8. The analysis system of claim 7, wherein said electromagnetic energy source comprises:

a light source that emits light; and

a tunable modulator that receives said light and modulates said received light.

9. The analysis system of claim 1, wherein said probe is a cantilever.

10. The analysis system of claim 1, further comprising:

a spectrum analyzer that receives a first signal from said detector;

a display that receives a second signal from said spectrum analyzer and generates a spectrum of said sample based on said second signal.

11. The analysis system of claim 1, further comprising:

a lock-in amplifier that receives a first signal from said detector;

a processor that receives a second signal from said lock-in amplifier; and

a display that receives a third signal from said processor and generates an image of said sample based on said third signal.

12. The analysis system of claim 1, wherein said first set of energies are applied to a first surface of said sample and said probe contacts a second surface of said sample positioned opposite to said first surface.

13. A method of analyzing a sample comprising:

applying a first set of energies at a first set of frequencies to a sample;

applying, simultaneously with said applying said first set of energies, a second set of energies at a second set of frequencies to a probe, wherein said first set of energies and said second set of energies form a multi-mode coupling; and

detecting an effect of said multi-mode coupling.

14. The method of claim 13, wherein said first set of energies are first vibrational energies and said second set of energies are second vibrational energies.

15. The method of claim 13, wherein said first set of energies are first electromagnetic energies and said second set of energies are second electromagnetic energies.

16. The method of claim 13, wherein said first set of energies are electromagnetic energies and said second set of energies are vibrational energies.

17. An analysis system comprising:

a first excitation source that applies to a sample a first set of energies at a first set of frequencies;

a second excitation source, independent of said first excitation source, that applies a second set of energies at a second set of frequencies to said sample, wherein said first set of energies and said second set of energies are simultaneously applied to said sample, and form a multi-mode coupling;

a probe that contacts said sample;

a detector that detects dynamics of said probe from which an effect of said multi-mode coupling can be obtained.

18. The analysis system of claim 17, wherein said first excitation source is a first vibrational source that applies first vibrational energies to said sample, and wherein said second excitation source is an electromagnetic energy source that applies second electromagnetic energies to said sample.

20. The analysis system of claim 17, wherein said probe is a cantilever.

21. The analysis system of claim 17, further comprising:

a spectrum analyzer that receives a first signal from said detector;

a display that receives a second signal from said spectrum analyzer and generates a spectrum of said sample based on said second signal.

22. The analysis system of claim 17, further comprising:

a lock-in amplifier that receives a first signal from said detector;

a processor that receives a second signal from said lock-in amplifier; and

a display that receives a third signal from said processor and generates an image of said sample based on said third signal.

23. The analysis system of claim 17, wherein said probe does not directly receive said first set of energies and does not directly receive said second set of energies.

19. An analysis system comprising:

a first excitation source that applies to a sample a first set of energies at a first set of frequencies;

a second excitation source, independent of said first excitation source, that applies a second set of energies at a second set of frequencies to said sample, wherein said first set of energies and said second set of energies are simultaneously applied to said sample, and form a multi-mode coupling;

a probe that contacts said sample;

a detector that detects dynamics of said probe from which an effect of said multi-mode coupling can be obtained;

wherein said first excitation source is a first electromagnetic energy source that applies first electromagnetic fields to said sample, and wherein said second excitation source is a second electromagnetic energy source that applies second electromagnetic fields to said sample.

24. A method of analyzing a sample comprising:

applying a first set of energies at a first set of frequencies to a sample;

applying simultaneously with said applying said first set of energies a second set of energies at a second set of frequencies to said sample, wherein said first set of energies and said second set of energies form a multi-mode coupling; and

detecting an effect of said multi-mode coupling effect via a probe that contacts said sample.

25. The method of claim 24, wherein said first set of energies are first vibrational energies and said second set of energies are second electromagnetic energies.

27. The method of claim 24, wherein said probe does not directly receive said first set of energies and does not directly receive said second set of energies.

26. A method of analyzing a sample comprising:

applying a first set of energies at a first set of frequencies to a sample;

applying simultaneously with said applying said first set of energies a second set of energies at a second set of frequencies to said sample, wherein said first set of energies and said second set of energies form a multi-mode coupling; and

detecting an effect of said multi-mode coupling effect via a probe that contacts said sample;

wherein said first set of energies are first electromagnetic energies and said second set of energies are second electromagnetic energies.