Electrostatic actuator device having multiple gap heights
First Claim
1. An electrostatic actuator operable to eject fluid from a fluid ejector for ink let recording or printing device, the electrostatic actuator comprising:
- a substrate;
an electrode having a flat surface portion and a device layer having a flat conductive surface portion formed on the substrate; and
a deflectable conductive membrane having discontinuous surface positioned in proximity to the flat surface portion of the electrode and the flat surface portion of the device layer so as to provide a gap between the electrode and the deflectable membrane and between the device layer and the deflectable membrane, the deflectable membrane being anchored on the substrate via at least two anchors and having a conductive landing post about midway between the at least two anchors that contacts the flat conductive surface portion of the device layer when the deflectable membrane is fully deflected, wherein the gap comprises at least one first region having a first gap height positioned near the one or more anchors and at least one second region having a second gap height positioned farther from the anchors than the first region, the first gap height being smaller than the second gap height, the first gap height and the second gap height being provided by the discontinuous surface of the deflectable membrane, with the flat surface portion of the electrode extending from a first location of the first gap to a second location of the second gap, wherein the first gap height, the second gap height, or both are sized to reduce a voltage required to cause the conductive landing post of the deflectable conductive membrane to make contact with the device layer, wherein the size of the gap in the first region ranges from about 0.1 um to about 3.0 um, and the size of the gap in the second region ranges from about 0.125 to about 4.0 um,wherein the deflectable conductive membrane is arranged to be substantially planar when not deflected and wherein the electrostatic actuator is operable to eject fluid from a fluid ejector for ink jet recording or printing device.
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Accused Products
Abstract
The present application is directed to novel electrostatic actuators and methods of making the electrostatic actuators. In one embodiment, the electrostatic actuator comprises a substrate, an electrode formed on the substrate and a deflectable member positioned in proximity to the electrode so as to provide a gap between the electrode and the deflectable member. The deflectable member is anchored on the substrate via one or more anchors. The gap comprises at least one first region having a first gap height positioned near the one or more anchors and at least one second region having a second gap height positioned farther from the anchors than the first region. The first gap height is smaller than the second gap height.
29 Citations
13 Claims
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1. An electrostatic actuator operable to eject fluid from a fluid ejector for ink let recording or printing device, the electrostatic actuator comprising:
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a substrate; an electrode having a flat surface portion and a device layer having a flat conductive surface portion formed on the substrate; and a deflectable conductive membrane having discontinuous surface positioned in proximity to the flat surface portion of the electrode and the flat surface portion of the device layer so as to provide a gap between the electrode and the deflectable membrane and between the device layer and the deflectable membrane, the deflectable membrane being anchored on the substrate via at least two anchors and having a conductive landing post about midway between the at least two anchors that contacts the flat conductive surface portion of the device layer when the deflectable membrane is fully deflected, wherein the gap comprises at least one first region having a first gap height positioned near the one or more anchors and at least one second region having a second gap height positioned farther from the anchors than the first region, the first gap height being smaller than the second gap height, the first gap height and the second gap height being provided by the discontinuous surface of the deflectable membrane, with the flat surface portion of the electrode extending from a first location of the first gap to a second location of the second gap, wherein the first gap height, the second gap height, or both are sized to reduce a voltage required to cause the conductive landing post of the deflectable conductive membrane to make contact with the device layer, wherein the size of the gap in the first region ranges from about 0.1 um to about 3.0 um, and the size of the gap in the second region ranges from about 0.125 to about 4.0 um, wherein the deflectable conductive membrane is arranged to be substantially planar when not deflected and wherein the electrostatic actuator is operable to eject fluid from a fluid ejector for ink jet recording or printing device. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An electrostatic actuator operable to eject fluid from a fluid ejector for ink jet recording or printing device, the electrostatic actuator comprising:
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a substrate; an electrode and a device layer formed on the substrate; and a deflectable conductive membrane having a concave-shaped surface relative to the electrode and the device layer when not deflected and positioned in proximity to the electrode and the device layer so as to provide a gap between the electrode and the deflectable membrane and between the device layer and the deflectable membrane, the deflectable membrane being anchored on the substrate via at least two anchors and having a landing post about midway between the at least two anchors that contacts the device layer when the deflectable membrane is fully deflected, wherein; the gap comprises at least one first region having a first gap height positioned near the one or more anchors and at least one second region having a second gap height positioned farther from the anchors than the first region, the first gap height being smaller than the second gap height, and the gap continuously varying in size between the first gap height and the second gap height, wherein the first gap height is sized to reduce a voltage required to cause the landing post of the deflectable conductive membrane to make contact with the device layer, wherein the landing post contacts the device layer at an electrically conductive position when the deflectable membrane is full deflected and wherein the electrostatic actuator is operable to eject fluid from a fluid ejector for ink jet recording or printing device. - View Dependent Claims (9)
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10. The electrostatic actuator of clim 8, wherein the gap comprises a fluid dielectric material including nitrogen gas and SF6.
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11. An electrostatic actuator operable to eject fluid from a fluid ejector for ink let recording or printing device, the electrostatic actuator comprising:
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a substrate; an electrode and a device layer formed on the substrate, wherein the electrode and the device layer comprise a concave structure relative to the substantially planar conductive and deflectable member; and a substantially planar conductive and deflectable member, wherein the planar conductive and deflectable member comprises the conductive surface arranged in proximity to the electrode and the device layer so as to provide a gap between the electrode and the deflectable membrane and between the device layer and the deflectable membrane, the deflectable membrane being anchored on the substrate by a first anchor and a second anchor near the lower region and having a landing post near the raised central region about midway between the first and the second anchors that is arranged to contact the device layer when the deflectable membrane is deflected by an applied voltage, wherein; the gap comprises a first region having a first gap height positioned near the first and the second anchors and a second region having a second gap height positioned near the landing post, the first gap height being smaller than the second gap height, and wherein the electrostatic actuator is operable to eject fluid from a fluid ejector for ink jet recording or printing device. - View Dependent Claims (12, 13)
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Specification