Piezoelectric device
First Claim
1. A piezoelectric device comprising:
- a support;
a piezoelectric thin-film including opposed main surfaces and being supported by the support on a support side of the piezoelectric thin-film;
IDT electrodes located on the support side of the piezoelectric thin-film to define an IDT electrode region; and
a space located over the IDT electrode region of the piezoelectric thin-film that is located on the support side such that the IDT electrodes are not in contact with the support;
whereinthe piezoelectric thin-film is configured such that vibration displacements are generated on both of the opposed main surfaces of the piezoelectric thin-film when a charge is applied to the IDT electrodes; and
the IDT electrodes are located only on the support side of the piezoelectric thin-film such that no IDT electrodes are disposed on a side of the piezoelectric thin-film opposite to the support side.
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Accused Products
Abstract
A piezoelectric device includes IDT electrodes and solves various problems resulting from the IDT electrodes. The piezoelectric device has a configuration in which a piezoelectric thin-film and a support are bonded together such that the piezoelectric thin-film is supported by the support. IDT electrodes and interconnect electrodes are provided on a surface of the piezoelectric thin-film that is located on the support side. The piezoelectric thin-film includes a region in which the IDT electrodes are provided and on which no support is provided but an opening is formed. This allows the IDT electrodes and the piezoelectric thin-film and the IDT electrode-formed region of the piezoelectric thin-film to not be in contact with the support, thereby defining a membrane including only the piezoelectric thin-film and the IDT electrodes as elements, the piezoelectric thin-film and the IDT electrodes being disposed therein and being important for properties of the piezoelectric device.
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Citations
5 Claims
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1. A piezoelectric device comprising:
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a support; a piezoelectric thin-film including opposed main surfaces and being supported by the support on a support side of the piezoelectric thin-film; IDT electrodes located on the support side of the piezoelectric thin-film to define an IDT electrode region; and a space located over the IDT electrode region of the piezoelectric thin-film that is located on the support side such that the IDT electrodes are not in contact with the support;
whereinthe piezoelectric thin-film is configured such that vibration displacements are generated on both of the opposed main surfaces of the piezoelectric thin-film when a charge is applied to the IDT electrodes; and the IDT electrodes are located only on the support side of the piezoelectric thin-film such that no IDT electrodes are disposed on a side of the piezoelectric thin-film opposite to the support side. - View Dependent Claims (2, 3, 4, 5)
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Specification