Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method
First Claim
1. An illumination optical system which illuminates a target surface with light from a light source, the illumination optical system comprising:
- a diffractive optical element which can be inserted at and retracted from a first position in an optical path of the illumination optical system by operation of a control system;
a spatial light modulator with a plurality of optical elements arrayed two-dimensionally and controlled individually, which can be inserted at and retracted from the first position or a second position optically conjugate with the first position by operation of the control system; and
a distribution forming optical system which forms a predetermined light intensity distribution on an illumination pupil with light having passed via at least one of the diffractive optical element and the spatial light modulator.
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Accused Products
Abstract
An illumination optical system which illuminates a surface to be illuminated on the basis of light from a light source has a first optical path in which a diffractive optical element can be arranged at a first position thereof; a second optical path in which a spatial light modulator with a plurality of optical elements arrayed two-dimensionally and controlled individually can be arranged at a second position thereof; and a third optical path which is an optical path of light having passed via at least one of the first optical path and the second optical path and in which a distribution forming optical system is arranged. The distribution forming optical system forms a predetermined light intensity distribution on an illumination pupil located in the third optical path, based on the light having passed via at least one of the first and second optical paths.
109 Citations
13 Claims
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1. An illumination optical system which illuminates a target surface with light from a light source, the illumination optical system comprising:
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a diffractive optical element which can be inserted at and retracted from a first position in an optical path of the illumination optical system by operation of a control system; a spatial light modulator with a plurality of optical elements arrayed two-dimensionally and controlled individually, which can be inserted at and retracted from the first position or a second position optically conjugate with the first position by operation of the control system; and a distribution forming optical system which forms a predetermined light intensity distribution on an illumination pupil with light having passed via at least one of the diffractive optical element and the spatial light modulator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification