Angular rate sensor with suppressed linear acceleration response
First Claim
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1. An angular rate sensor comprising:
- first and second generally planar masses disposed along a first axis in the plane of the masses;
a supporting frame in the plane of the masses and mounted for torsional movement about a second axis which is perpendicular to the first axis;
flexures suspending the masses from the frame and constraining the masses for linear movement along the first axis relative to the frame;
a pair of anti-phase couplers suspended from the frame and connected to the masses for constraining the masses for anti-phase linear movement along the first axis, wherein said couplers are spaced apart in a direction substantially perpendicular to the first axis, and each coupler comprising;
a supporting beam which extends in a direction substantially parallel to the first axis and is mounted to the frame at its two ends;
first and second link springs which extend from the first and second masses respectively to the beam and join one another to form a common joint at substantially the midpoint of the supporting beam;
actuation means for driving the masses to oscillate along or about a preselected drive axis in drive-mode;
detection means responsive to the sense-mode movement of the frame and/or the masses in response to Coriolis forces produced by the rotation of the masses about a predetermined input axis which is perpendicular to the velocities of the masses in drive-mode for monitoring rate of rotation about the input axis.
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Abstract
An angular rate sensor having two generally planar proof masses, a drive axis in the plane of the masses, and an input axis perpendicular to the drive axis. The masses are suspended from a sensing frame and constrained for anti-phase movement along the drive axis in drive-mode. The sensing frame is mounted for torsional movement in sense-mode about the input axis in response to Coriolis forces produced by rotation of the masses about the input axis, with sensors responsive to the torsional movement of the sensing frame and the masses about the input axis for monitoring rate of rotation.
49 Citations
8 Claims
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1. An angular rate sensor comprising:
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first and second generally planar masses disposed along a first axis in the plane of the masses; a supporting frame in the plane of the masses and mounted for torsional movement about a second axis which is perpendicular to the first axis; flexures suspending the masses from the frame and constraining the masses for linear movement along the first axis relative to the frame; a pair of anti-phase couplers suspended from the frame and connected to the masses for constraining the masses for anti-phase linear movement along the first axis, wherein said couplers are spaced apart in a direction substantially perpendicular to the first axis, and each coupler comprising; a supporting beam which extends in a direction substantially parallel to the first axis and is mounted to the frame at its two ends; first and second link springs which extend from the first and second masses respectively to the beam and join one another to form a common joint at substantially the midpoint of the supporting beam; actuation means for driving the masses to oscillate along or about a preselected drive axis in drive-mode; detection means responsive to the sense-mode movement of the frame and/or the masses in response to Coriolis forces produced by the rotation of the masses about a predetermined input axis which is perpendicular to the velocities of the masses in drive-mode for monitoring rate of rotation about the input axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification