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Dual hexagonal shaped plasma source

  • US 8,454,810 B2
  • Filed: 07/14/2006
  • Issued: 06/04/2013
  • Est. Priority Date: 07/14/2006
  • Status: Active Grant
First Claim
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1. A hollow cathode magnetron, comprising:

  • a first hexagonal hollow cathode, the cathode including six targets arranged in a hexagonal shape and one or more magnets associated with each of the six targets to generate and maintain a high density plasma;

    a second hexagonal hollow cathode including six targets arranged in a hexagonal shape located concentric to the first hexagonal hollow cathode and one or more magnets associated with each of the six targets; and

    an anode located beneath the cathode,wherein,each target having one or more magnets with a single radially oriented polarity with respect to the first and second concentric hexagonal hollow cathodes;

    magnets associated with adjacent targets having opposite magnetic polarity;

    the magnetic field lines of the first and second hexagonal hollow cathode couple to each other;

    magnetic field lines are used to generate plasma from the injected inert gas; and

    plasma ions impact the six targets of each hexagonal hollow cathode, thereby enhancing the erosion profile of the six targets.

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