Polymer materials for formation of registered arrays of cylindrical pores

• US 8,455,082 B2
• Filed: 02/14/2012
• Issued: 06/04/2013
• Est. Priority Date: 04/21/2008
• Status: Active Grant

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Millward, Dan B.
• Primary Examiner(s): Loney, Donald J
• Application Number:
  US13/396,261
• Publication Number:
  US 20120141741A1
• Time in Patent Office: 476 Days
• Field of Search: 428/105, 428/119, 428/120, 428/172, 428/173, 977/789
• US Class Current: 428/119
• CPC Class Codes: B05D 1/34 Applying different liquids or other fluent materials simultaneously
• CPC Class Codes: B05D 3/0254 After-treatment
• CPC Class Codes: B05D 5/02 to obtain a matt or rough surface
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: Y10S 438/947 Subphotolithographic processing
• CPC Class Codes: Y10S 977/888 Shaping or removal of materials, e.g. etching
• CPC Class Codes: Y10S 977/895 having step or means utilizing chemical property
• CPC Class Codes: Y10S 977/90 having step or means utilizing mechanical or thermal property, e.g. pressure, heat
• CPC Class Codes: Y10T 428/24174 including sheet or component perpendicular to plane of web or sheet
• CPC Class Codes: Y10T 428/24182 Inward from edge of web or sheet
• CPC Class Codes: Y10T 428/24612 Composite web or sheet
• CPC Class Codes: Y10T 428/2462 with partial filling of valleys on outer surface

Abstract

Methods for fabricating sublithographic, nanoscale polymeric microstructures utilizing self-assembling block copolymers, and films and devices formed from these methods are provided.

Claims

1. A polymeric material comprising:

a self-assembled block copolymer material within a trench exhibiting a substantially uniform width in a material overlying a substrate, the self-assembled block copolymer material comprising a single row of cylindrical domains of a minority polymer block in a matrix of a majority polymer block, each cylindrical domain of the minority polymer block oriented perpendicular to a floor of the trench and comprising;

a first end substantially uncovered by the matrix of the majority polymer block; and

a second, opposing end covered by the matrix of the majority polymer block; and

another self-assembled block copolymer material overlying the self-assembled block copolymer material and comprising cylindrical domains of another minority polymer block in a matrix of another majority polymer block, each cylindrical domain of the another minority polymer block oriented perpendicular to the floor of the trench and registered to an underlying cylindrical domain of the minority polymer block of the self-assembled block copolymer material.

2. The polymeric material of claim 1, wherein the trench has a depth of about 50 percent to 90 percent of the thickness of the self-assembled block copolymer material.

3. The polymeric material of claim 1, wherein the substantially uniform width of the trench is within a range of from about one times (1×

) to one and a half times (1.5×

) an inherent pitch value of a block copolymer material used to form the self-assembled block copolymer material.

4. The polymeric material of claim 1, wherein the self-assembled block copolymer material comprises self-assembled poly(styrene)-b-poly(vinylpyridine).

5. The polymeric material of claim 1, wherein the self-assembled block copolymer material comprises self-assembled poly(styrene)-b-poly(methylmethacrylate).

6. The polymeric material of claim 1, wherein the self-assembled block copolymer material comprises self-assembled poly(styrene)-b-poly(dimethylsiloxane).

7. A polymeric material comprising:

a self-assembled block copolymer material within a trench in a material overlying a substrate, the self-assembled block copolymer material comprising a single row of cylindrical polymer domains in a polymer matrix domain, each of the cylindrical polymer domains oriented perpendicular to a floor of the trench and parallel to sidewalls of the trench and comprising;

a face substantially uncovered by the polymer matrix domain; and

an opposing end embedded within and surrounded by the polymer matrix domain; and

another self-assembled block copolymer material on the self-assembled block copolymer material and comprising other cylindrical polymer domains in another polymer matrix domain, each of the other cylindrical polymer domains aligned with and located on an underlying cylindrical polymer domain of the self-assembled block copolymer material.

8. The polymeric material of claim 7, wherein adjacent cylindrical polymer domains of the self-assembled block copolymer material are spaced apart a distance substantially equal to an inherent pitch value of a block copolymer material used to form the self-assembled block copolymer material.

9. The polymeric material of claim 7, wherein a thickness of the another self-assembled block copolymer material is greater than or equal to an inherent pitch value of a block copolymer material used to form the another self-assembled block copolymer material.

10. A polymeric material comprising:

a self-assembled block copolymer material within a trench exhibiting a substantially uniform width in a material, the self-assembled block copolymer material comprising;

a single row of cylindrical domains of a minority polymer block within a matrix of a majority polymer block, each cylindrical domain of the minority polymer block oriented perpendicular to a floor of the trench and spaced apart from an adjacent cylindrical domain of the minority polymer block and from sidewalls of the trench by substantially the same distance; and

a brush material on the floor of the trench and comprising a bilayer of the majority polymer block and the minority polymer block, the minority polymer block wetting the floor of the trench; and

another self-assembled block copolymer material overlying the self-assembled block copolymer material and comprising cylindrical domains of another minority polymer block within a matrix of another majority polymer block, each cylindrical domain of the another minority polymer block oriented perpendicular to the floor of the trench and registered to an underlying cylindrical domain of the minority polymer block of the self-assembled block copolymer material.

11. A polymeric material comprising a self-assembled block copolymer material within a trench exhibiting a substantially uniform width in a material, the self-assembled block copolymer material comprising a single row of cylindrical polymer domains within a polymer matrix, each of the cylindrical polymer domains oriented perpendicular to a floor and the trench and parallel to sidewalls of the trench and comprising substantially uncovered by the polymer matrix and an opposing end covered by the polymer matrix.

12. A polymeric material comprising:

a self-assembled block copolymer material within a trench in a material and comprising;

a single row of cylinders of a first polymer block within a matrix of a second polymer block of a block copolymer material, each cylinder of the first polymer block oriented perpendicular to a floor of the trench and comprising;

a first end substantially uncovered by the matrix of the second polymer block; and

a second, opposing end embedded within and surrounded by the matrix of the second polymer block; and

a brush material comprising the first polymer block wetting the floor of the trench, the sidewalls of the trench, and ends of the trench.

13. A polymeric material comprising:

a self-assembled block copolymer within trenches each exhibiting a substantially uniform width in a material, portions of the self-assembled block copolymer material within the trenches each comprising a single row of cylinders of a minority polymer block within a matrix of a majority polymer block, each cylinder of the minority polymer block oriented perpendicular to floors of the trenches and comprising;

a face substantially uncovered by the matrix of the majority polymer block; and

an opposing end covered by the matrix of the majority polymer block; and

another self-assembled block copolymer material overlying the self-assembled block copolymer material and comprising cylinders of another minority polymer block within a matrix of a another majority polymer block, at least some of the cylinders of the another minority polymer block oriented perpendicular to the floors of the trenches and registered to underlying cylinders of the minority polymer block of the self-assembled block copolymer.

14. The polymeric material of claim 13, wherein the self-assembled block copolymer further comprises a brush material comprising the minority polymer block wetting the floor of the trench, the sidewalls of the trench, and ends of the trench.

15. The polymeric material of claim 13, wherein the another self-assembled block copolymer further comprises a brush material comprising the another minority polymer block wetting spacers within each of the trenches.

16. The polymeric material of claim 13, wherein at least some other of the cylinders of the another minority polymer block of the another self-assembled block copolymer material are oriented parallel to the floors of the trenches and overly spacers within the trenches.

17. The polymeric material of claim 13, wherein the cylinders of the minority polymer block of the self-assembled block copolymer material in adjacent trenches are substantially aligned with each other.

18. A polymeric material comprising:

a base material within a trench exhibiting a substantially uniform width in a material, the base material comprising a single row of polymer cylinders within a polymer matrix, each of the polymer cylinders oriented perpendicular to a floor of the trench and parallel to sidewalls of the trench; and

a polymer material over the base material and comprising additional polymer cylinders in another polymer matrix, each of the additional polymer cylinders registered to an underlying polymer cylinder of the base material.

19. The polymeric material of claim 18, wherein each of the additional polymer cylinders of the polymer material is oriented parallel to each of the polymer cylinders of the base material.

20. The polymeric material of claim 18, further comprising parallel cylinders embedded in the another polymer matrix of the polymer material.