Laser liftoff structure and related methods
First Claim
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1. A method of making a light emitting device, the method comprising:
- providing a first multi-layer stack, comprising;
a substrate,a submount,a high bandgap buffer region between the substrate and the submount, wherein the buffer region includes a dislocation reduction region wherein the first multi-layer stack includes an n-doped region formed directly on the buffer region; and
a sacrificial portion between the buffer region and the submount wherein the n-doped region comprises the sacrificial portion; and
exposing the sacrificial portion to electromagnetic radiation to at least partially decompose the sacrificial portion; and
removing the substrate and at least part of the buffer region from the first multi-layer stack to form a second multi-layer stack,wherein the substrate and the buffer region are transparent to wavelengths of the electromagnetic radiation.
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Abstract
Light-emitting devices, and related components, systems, and methods associated therewith are provided.
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Citations
11 Claims
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1. A method of making a light emitting device, the method comprising:
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providing a first multi-layer stack, comprising; a substrate, a submount, a high bandgap buffer region between the substrate and the submount, wherein the buffer region includes a dislocation reduction region wherein the first multi-layer stack includes an n-doped region formed directly on the buffer region; and a sacrificial portion between the buffer region and the submount wherein the n-doped region comprises the sacrificial portion; and exposing the sacrificial portion to electromagnetic radiation to at least partially decompose the sacrificial portion; and removing the substrate and at least part of the buffer region from the first multi-layer stack to form a second multi-layer stack, wherein the substrate and the buffer region are transparent to wavelengths of the electromagnetic radiation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification