Method of fabricating epitaxial structures
First Claim
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1. A method of fabricating epitaxial structures, the method comprising:
- growing a first etch stop on a first side of a substrate;
growing at least one epitaxial layer on the first side of the substrate;
flipping the substrate;
growing a second etch stop on a second side of the substrate;
growing at least one epitaxial layer on the second side of the substrate;
applying a carrier medium to the first and second sides of the substrate;
dividing the substrate into two parts generally along an epitaxial plane to create a first epitaxial structure and a second epitaxial structure;
removing residual substrate from the first and second epitaxial structures; and
removing the first and second etch stops.
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Abstract
A method of fabricating epitaxial structures including applying an etch stop to one side of a substrate and then growing at least one epitaxial layer on a first side of said substrate, flipping the substrate, growing a second etch stop and at least one epitaxial layer on a second side of the substrate, applying a carrier medium to the ultimate epitaxial layer on each side, dividing the substrate into two parts generally along an epitaxial plane to create separate epitaxial structures, removing any residual substrate and removing the etch stop.
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Citations
12 Claims
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1. A method of fabricating epitaxial structures, the method comprising:
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growing a first etch stop on a first side of a substrate; growing at least one epitaxial layer on the first side of the substrate; flipping the substrate; growing a second etch stop on a second side of the substrate; growing at least one epitaxial layer on the second side of the substrate; applying a carrier medium to the first and second sides of the substrate; dividing the substrate into two parts generally along an epitaxial plane to create a first epitaxial structure and a second epitaxial structure; removing residual substrate from the first and second epitaxial structures; and removing the first and second etch stops. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification