Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing method
First Claim
1. An inspection device for inspecting a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually, said inspection device comprising:
- a conjugate optical system which is arranged optically downstream from the spatial light modulator and which forms a conjugate plane optically conjugate with an array plane where the plurality of optical elements are arrayed;
a first photodetector having a first detection surface arranged on or near the conjugate plane;
a Fourier transform optical system which is arranged optically downstream from the spatial light modulator and which forms a Fourier transform plane optically in a Fourier transform relation with the array plane where the plurality of optical elements are arrayed;
a second photodetector having a second detection surface arranged on or near the Fourier transform plane; and
an inspection unit which receives a first output of the first photodetector and a second output of the second photodetector and which inspects optical characteristics of the plurality of optical elements.
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Accused Products
Abstract
There is disclosed an inspection device for inspecting a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually, said inspection device comprising, a conjugate optical system which is arranged optically downstream the spatial light modulator and which forms a conjugate plane optically conjugate with an array plane where the plurality of optical elements are arrayed, a photodetector having a detection surface arranged on or near the conjugate plane, and an inspection unit which inspects optical characteristics of the plurality of optical elements, based on a result of detection by the photodetector.
93 Citations
29 Claims
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1. An inspection device for inspecting a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually, said inspection device comprising:
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a conjugate optical system which is arranged optically downstream from the spatial light modulator and which forms a conjugate plane optically conjugate with an array plane where the plurality of optical elements are arrayed; a first photodetector having a first detection surface arranged on or near the conjugate plane; a Fourier transform optical system which is arranged optically downstream from the spatial light modulator and which forms a Fourier transform plane optically in a Fourier transform relation with the array plane where the plurality of optical elements are arrayed; a second photodetector having a second detection surface arranged on or near the Fourier transform plane; and an inspection unit which receives a first output of the first photodetector and a second output of the second photodetector and which inspects optical characteristics of the plurality of optical elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. An inspecting method for inspecting a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually, said inspecting method comprising:
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inspecting optical characteristics of the plurality of optical elements using a first photodetector and a second photodetector, the first photodetector making a detection based on a light intensity distribution formed on or near a conjugate plane optically conjugate with an array plane where the plurality of optical elements are arrayed, by light having traveled via the plurality of optical elements, and the second photodetector making a detection based on a light intensity distribution formed on or near a Fourier transform plane optically in a Fourier transform relation with the array plane, by light having traveled via the plurality of optical elements. - View Dependent Claims (26, 27, 28, 29)
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Specification