Multi-axis capacitive accelerometer
First Claim
1. A multi-axis capacitive accelerometer, comprising at least:
- a substrate; and
an element structure layer, disposed on the substrate and spaced apart from the substrate by an interval;
the element structure layer comprising;
a plurality of anchors, fixed on the substrate;
a plurality of independent sets of springs, comprising at least a first independent set of springs and a second independent set of springs;
a first mass, asymmetrically suspended on one of the plurality of anchors by means of the first independent set of springs and having a rotation axis along a first direction, so that the mass of the first mass is asymmetrically distributed on a second direction and when the first mass is exerted by a force in a third direction, the first mass rotates about the rotation axis;
a second mass, suspended on the first mass by means of the second independent set of springs, wherein the second mass senses the acceleration in the first direction or the second direction and moves correspondingly in the first direction or the second direction; and
at least a comb-shaped set of capacitors, disposed at the element structure layer.
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Accused Products
Abstract
A multi-axis capacitive accelerometer is disclosed. A first mass is disposed and held by an anchor supported by a substrate, wherein the first mass is asymmetrically suspended on the anchor by means of two cantilevers, so that the first mass rotates about a rotation axis, for sensing the acceleration in a first direction perpendicular to the substrate. A second mass is disposed in the first mass and suspended on the first mass by means of a set of springs to sense the acceleration in a second direction parallel to the substrate. Furthermore, a third mass can be disposed in the second mass, wherein the third mass is suspended on the second mass by means of another set of springs to sense the acceleration in a third direction. The first direction, the second direction and the third direction are mutually orthogonal to each other.
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Citations
17 Claims
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1. A multi-axis capacitive accelerometer, comprising at least:
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a substrate; and an element structure layer, disposed on the substrate and spaced apart from the substrate by an interval;
the element structure layer comprising;a plurality of anchors, fixed on the substrate; a plurality of independent sets of springs, comprising at least a first independent set of springs and a second independent set of springs; a first mass, asymmetrically suspended on one of the plurality of anchors by means of the first independent set of springs and having a rotation axis along a first direction, so that the mass of the first mass is asymmetrically distributed on a second direction and when the first mass is exerted by a force in a third direction, the first mass rotates about the rotation axis; a second mass, suspended on the first mass by means of the second independent set of springs, wherein the second mass senses the acceleration in the first direction or the second direction and moves correspondingly in the first direction or the second direction; and at least a comb-shaped set of capacitors, disposed at the element structure layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A multi-axis capacitive accelerometer, comprising:
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a substrate; and an element structure layer, disposed on the substrate and spaced apart from the substrate by an interval;
the element structure layer comprising;a plurality of anchors, fixed on the substrate; a plurality of independent sets of springs, comprising at least a first independent set of springs, a second independent set of springs and a third independent set of springs; a first mass, asymmetrically suspended on one of the plurality of anchors by means of the first independent set of springs and having a rotation axis along a first direction, so that the mass of the first mass is asymmetrically distributed on a second direction and when the first mass is exerted by a force in a third direction, the first mass rotates about the rotation axis; a second mass, suspended on the first mass by means of the second independent set of springs, wherein the second mass senses the acceleration in the first direction or the second direction and moves correspondingly in the first direction or the second direction; at least a comb-shaped set of capacitors, disposed at the element structure layer; and a third mass, suspended at the second mass by means of the third independent set of springs, wherein the third mass moves in a direction perpendicular to a plane which the movement direction of the second mass is on. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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Specification