×

Sub-threshold elastic deflection FET sensor for sensing pressure/force, a method and system thereof

  • US 8,459,128 B2
  • Filed: 06/19/2008
  • Issued: 06/11/2013
  • Est. Priority Date: 04/15/2008
  • Status: Expired due to Fees
First Claim
Patent Images

1. A Field Effect Transistor (FET) sensor for sensing pressure/force, said FET sensor comprising:

  • a. an elastic member forming a moving gate of the FET sensor,b. a fixed dielectric on a substrate of the FET sensor, wherein said substrate comprises a thin film of a semiconducting material and a buried oxide layer of Silicon, andc. a fluid dielectric formed between the elastic member and the fixed dielectric, wherein the FET sensor is operated in a sub threshold region for sensing the pressure/force on the elastic member, wherein the pressure/force alters a height of said fluid dielectric due to pressure/force on the elastic member thereby varying gate capacitance of the FET sensor for measuring the pressure/force.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×