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Drug delivery chip and fabricating method thereof

  • US 8,460,564 B2
  • Filed: 01/28/2010
  • Issued: 06/11/2013
  • Est. Priority Date: 06/06/2009
  • Status: Active Grant
First Claim
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1. A method of fabricating a drug-delivery chip, comprising the steps of:

  • providing a substrate and there being a stack structure comprising an insulation layer, a conductive wire layer having void spaces, and a protection layer on a first surface of the substrate;

    etching the protection layer at a position corresponding to the void spaces of the conductive wire layer to form an opening, wherein the opening is directly above the void spaces;

    forming a metal thin film on the conductive wire layer to seal up the opening, wherein the metal thin film has two ends respectively connected to the conductive wire layer on each of two sides of the opening and is electrically connected to a control module via the conductive wire layer;

    etching the substrate and the insulation layer to form a drug receiving space and expose the metal thin film;

    filling the drug receiving space with a drug; and

    installing a sealing film on a second surface of the substrate to seal up the drug filled in the drug receiving space.

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