Charged particle source with integrated energy filter

• US 8,461,525 B2
• Filed: 08/04/2011
• Issued: 06/11/2013
• Est. Priority Date: 05/26/2008
• Status: Active Grant

• Current Assignee: FEI Company (Thermo Fisher Scientific Incorporated)
• Original Assignee: FEI Company (Thermo Fisher Scientific Incorporated)
• Inventors: Henstra, Alexander
• Primary Examiner(s): Kim, Robert
• Assistant Examiner(s): Smith, David E
• Application Number:
  US13/198,640
• Publication Number:
  US 20110284763A1
• Time in Patent Office: 677 Days
• Field of Search: 250/305, 250396 R-396 ML
• US Class Current: 250/305
• CPC Class Codes: H01J 2237/045 Diaphragms
• CPC Class Codes: H01J 2237/057 Energy or mass filtering
• CPC Class Codes: H01J 2237/061 Construction
• CPC Class Codes: H01J 2237/08 Ion sources
• CPC Class Codes: H01J 2237/15 Means for deflecting or directing discharge
• CPC Class Codes: H01J 2237/1534 Aberrations
• CPC Class Codes: H01J 3/027 Construction of the gun or parts thereof H01J3/021 - H01J3/025, H01J3/026 and H01J3/028 take precedence
• CPC Class Codes: H01J 3/04 Ion guns
• CPC Class Codes: H01J 37/05 Electron or ion-optical arrangements for separating electrons or ions according to their energy or massparticle separator tubes H01J49/00
• CPC Class Codes: H01J 37/063 Geometrical arrangement of electrodes for beam-forming

Abstract

A particle source in which energy selection occurs by sending a beam of electrically charged particles eccentrically through a lens so that energy dispersion will occur in an image formed by the lens. By projecting this image onto a slit in an energy selecting diaphragm, it is possible to allow only particles in a limited portion of the energy spectrum to pass. Consequently, the passed beam will have a reduced energy spread. The energy dispersed spot is imaged on the slit by a deflector. When positioning the energy dispersed spot on the slit, central beam is deflected from the axis to such an extent that it is stopped by the energy selecting diaphragm. Hereby reflections and contamination resulting from this beam in the region after the diaphragm are avoided. Also electron-electron interaction resulting from the electrons from the central beam interacting with the energy filtered beam in the area of deflector is avoided.

Claims

1. A method of operating a charged particle source, comprising:

forming a first charged particle beam from charged particles passing though a lens along its optical axis;

forming a second charged particle beam from charged particles passing through the lens away from it optical axis;

a beam limiting diaphragm;

an energy selecting diaphragm having a first and second aperture for selectively different energies for the first charged particle beam and the second charged particle beam;

selectively passing either the first charged particle beam through the first aperture or the second charged particle beam through the second aperture, but not both, by using a single deflector that allows one beam to pass through one aperture and be focused onto a sample while simultaneously deflecting the other beam to such an extent that the other beam is blocked from reaching the sample.

2. The method of claim 1 in which selectively passing the first charged particle beam or the second charged particle beam through one or more apertures includes deflecting one of the first and second charged particle beams toward a barrier and deflecting the other one of the first and second charged particle beams toward an aperture.

3. The method of claim 2 in which deflecting one of the first and second charged particle beams into a barrier and deflecting the other one of the first and second charged particle beams toward an aperture includes deflecting the first beam into a barrier and deflecting the second beam into an energy selecting aperture.

4. The method of claim 2 in which deflecting one of the first and second charged particle beams into a barrier and deflecting the other one of the first and second charged particle beams toward an aperture includes deflecting both beams using a single multipole that functions as the lens and the deflector.

5. A method of operating a charged particle source, comprising:

providing a charged particle system including a charged particle source, a lens for focusing charged particles onto a sample, said lens having an optical axis, a beam limiting diaphragm for limiting of the beam, a central beam going through the middle of the lens and an eccentric beam going eccentrically through the lens, an energy selecting diaphragm showing an energy selecting aperture for passing a part of the eccentric beam and a central aperture for passing the central beam, said energy selecting diaphragm positioned between the particle emitting surface and the deflector, and a first and a second deflector deflecting the two beams;

forming at least two charged particle beams using the beam limiting diaphragm, a first central beam going through the middle of the lens and a second eccentric beam going eccentrically through the lens;

applying the first deflector to deflect one of the beams toward the optical axis; and

applying the second deflector to focus and align the eccentric beam on the energy selecting aperture, while simultaneously deflecting the central beam to such an extent that the central beam is blocked by the energy selecting diaphragm.

6. A method of operating a charged particle source, comprising:

providing a charged particle system including a charged particle emitter, a lens having an optical axis, multiple first apertures, and a deflector;

focusing the charged particles emitted by the emitter into a beam with the lens;

producing at least two beams using the multiple first apertures, including a central beam passing through the center of the lens and at least one eccentric beam passing through the lens away from its center;

applying the deflector to select either the central beam or one of the eccentric beams to pass through a corresponding aperture and out of the charged particle source, the beams not selected being blocked so that a single beam leaves the charged particle source.

7. The method of claim 6 in which applying the deflector to select either the central beam or one of the eccentric beams to pass through a corresponding aperture comprises applying the deflector to select either the central beam or one of the eccentric beams to pass through an energy selecting aperture.

8. The method of claim 6 in which the deflector is a single multipole that functions as a lens and a deflector.

9. The method of claim 6 further comprising using an additional deflector for selectively deflecting the one of the eccentric beam so that the one of the eccentric beam exits the charged particle source essentially parallel to the optical axis.