Thin film transistor and display device
First Claim
1. A thin film transistor comprising:
- a gate electrode on a substrate;
a gate insulation film on the gate electrode;
an oxide semiconductor layer on the gate insulation film;
a channel protection film on the oxide semiconductor layer;
source and drain electrodes on the channel protection film; and
a passivation film on the source and drain electrodes,wherein,each of the gate insulation film, channel protection film, and passivation film is laminated and includes a first layer made of aluminum oxide and a second layer made of an insulation material including silicon (Si).
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Accused Products
Abstract
Provided are a thin film transistor that is capable of suppressing desorption of oxygen and others from an oxide semiconductor layer, and reducing the time to be taken for film formation, and a display device provided therewith. A gate insulation film 22, a channel protection layer 24, and a passivation film 26 are each in the laminate configuration including a first layer 31 made of aluminum oxide, and a second layer 32 made of an insulation material including silicon (Si). The first and second layers 31 and 32 are disposed one on the other so that the first layer 31 comes on the side of an oxide semiconductor layer 23. The oxide semiconductor layer 23 is sandwiched on both sides by the first layers 31 made of aluminum oxide, thereby suppressing desorption of oxygen and others, and stabilizing the electrical characteristics of a TFT 20. Moreover, since the second layer 32 is made of an insulation material including silicon (Si), the time to be taken for film formation can be reduced compared with a single layer made of aluminum oxide.
43 Citations
13 Claims
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1. A thin film transistor comprising:
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a gate electrode on a substrate; a gate insulation film on the gate electrode; an oxide semiconductor layer on the gate insulation film; a channel protection film on the oxide semiconductor layer; source and drain electrodes on the channel protection film; and a passivation film on the source and drain electrodes, wherein, each of the gate insulation film, channel protection film, and passivation film is laminated and includes a first layer made of aluminum oxide and a second layer made of an insulation material including silicon (Si). - View Dependent Claims (2, 3)
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4. A thin film transistor, comprising:
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a gate electrode on a substrate; a gate insulation film on the gate electrode; an oxide semiconductor layer on the gate insulation film; a channel protection film on the oxide semiconductor layer; source and drain electrodes on the channel protection film; and a passivation film on the source and drain electrodes, wherein, the passivation film is made of an oxide, nitride, or oxynitride containing one or more of aluminum (Al), titanium (Ti), and tantalum (Ta), and the density of the passivation film is from 3.0 g/cm3 to 4.0 g/cm3. - View Dependent Claims (5, 6, 7, 8, 9)
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10. A display device comprising:
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a display element; and a thin film transistor comprising; a gate electrode on a substrate, a gate insulation film on the gate electrode, an oxide semiconductor layer on the gate insulation film, a channel protection film on the oxide semiconductor layer, source and drain electrodes on the channel protection film, and a passivation film on the source and drain electrodes, wherein, each of the gate insulation film, channel protection film, and passivation film is laminated and includes a first layer made of aluminum oxide and a second layer made of an insulation material including silicon (Si). - View Dependent Claims (11)
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12. A display device, comprising:
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a display element; and a thin film transistor comprising a gate electrode on a substrate, a gate insulation film on the gate electrode, an oxide semiconductor layer on the gate insulation film, a channel protection film on the oxide semiconductor layer, source and drain electrodes on the channel protection film, and a passivation film on the source and drain electrodes, wherein, the passivation film is made of an oxide, nitride, or oxynitride containing one or more of aluminum (Al), titanium (Ti), and tantalum (Ta), and the density of the passivation film is from 3.0 g/cm3 to 4.0 g/cm3. - View Dependent Claims (13)
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Specification