Manufacturing method for electrooptic element and optical deflector including electrooptic element
First Claim
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1. An electrooptic element comprising:
- an optical waveguide layer made from a ferroelectric material as a magnesium-oxide-doped lithium niobate and including a polarization inverted region of a predetermined shape having an optical incidence face and an optical exit face so that at least one of the optical incidence face and the optical exit face is formed in parallel with a crystal face of the ferroelectric material; and
an upper electrode layer and a lower electrode layer formed on a top face and a bottom face of the optical waveguide layer, respectively.
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Abstract
An electrooptic element includes an optical waveguide layer made from a ferroelectric material and having a polarization inverted region of a predetermined shape having an optical incidence face and an optical exit face, and an upper electrode layer and a lower electrode layer formed on a top face and a bottom face of the optical waveguide layer, respectively, in which the ferroelectric material is magnesium-oxide-doped lithium niobate, and at least one of the optical incidence face and the optical exit face of the optical waveguide layer is formed in parallel with a crystal face of the ferroelectric material.
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11 Claims
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1. An electrooptic element comprising:
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an optical waveguide layer made from a ferroelectric material as a magnesium-oxide-doped lithium niobate and including a polarization inverted region of a predetermined shape having an optical incidence face and an optical exit face so that at least one of the optical incidence face and the optical exit face is formed in parallel with a crystal face of the ferroelectric material; and an upper electrode layer and a lower electrode layer formed on a top face and a bottom face of the optical waveguide layer, respectively. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification