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Systems for curing deposited material using feedback control

  • US 8,463,116 B2
  • Filed: 07/01/2008
  • Issued: 06/11/2013
  • Est. Priority Date: 07/01/2008
  • Status: Active Grant
First Claim
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1. A curing system, comprising:

  • a support configured to support a substrate having a curable material deposited thereon;

    a first light source in optical communication with a first location on the support corresponding to a portion of the curable material deposited on the substrate, wherein the first light source is configured to provide local heating to the first location to selectively heat the portion of the curable material independent of heating adjacent areas of the curable material, and wherein the local heating is sufficient to cure the curable material;

    a detector configured to monitor light from the first light source that impinges on the curable material at the first location; and

    a control system configured to control light emitted from the first light source in response to information received from the detector.

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