Systems for curing deposited material using feedback control
First Claim
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1. A curing system, comprising:
- a support configured to support a substrate having a curable material deposited thereon;
a first light source in optical communication with a first location on the support corresponding to a portion of the curable material deposited on the substrate, wherein the first light source is configured to provide local heating to the first location to selectively heat the portion of the curable material independent of heating adjacent areas of the curable material, and wherein the local heating is sufficient to cure the curable material;
a detector configured to monitor light from the first light source that impinges on the curable material at the first location; and
a control system configured to control light emitted from the first light source in response to information received from the detector.
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Abstract
Systems are provided for curing a deposited curable material film using a light source and feedback system for monitoring the degree of curing using detected optical properties of the film. Operational parameters of the light source (e.g., power) are adjusted by a control system in response to the detected optical properties of the film. In certain embodiments, the curing system includes at least one light source in optical communication with an uncured material, a detector for monitoring an optical property of the curing material, and a feedback system for controlling the light emitted from the light source in response to the detector.
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Citations
17 Claims
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1. A curing system, comprising:
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a support configured to support a substrate having a curable material deposited thereon; a first light source in optical communication with a first location on the support corresponding to a portion of the curable material deposited on the substrate, wherein the first light source is configured to provide local heating to the first location to selectively heat the portion of the curable material independent of heating adjacent areas of the curable material, and wherein the local heating is sufficient to cure the curable material; a detector configured to monitor light from the first light source that impinges on the curable material at the first location; and a control system configured to control light emitted from the first light source in response to information received from the detector. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A curing system, comprising:
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a substrate having an area of curable material deposited thereon; a support configured to support the substrate; a first light source in optical communication with the substrate, wherein the first light source is configured to provide local heating to a portion of the area of curable material to selectively heat the portion of the area of curable material independent of heating the remaining area of the curable material, and wherein the local heating is sufficient to cure the curable material; a detector configured to monitor light from the first light source that impinges on the curable material at the first location; and a control system configured to control light emitted from the first light source in response to information received from the detector.
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Specification