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Systems and methods for determining resonant frequency and quality factor of overdamped systems

  • US 8,464,571 B1
  • Filed: 03/22/2010
  • Issued: 06/18/2013
  • Est. Priority Date: 03/20/2009
  • Status: Active Grant
First Claim
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1. A calibration system for a MEMS system that is overdamped along at least one motion axis, the system comprising:

  • a measurement module for determining a location of a pole of a MEMS device along the at least one motion axis;

    a closed-loop feedback system configured to change a first location of the pole to a second location of the pole;

    a computation module for calculating a resonant frequency, a quality factor, or both using the first and the second location of the pole as determined by the measurement module; and

    a calibration module for calibrating the MEMS system based on the calculated resonant frequency, the calculated quality factor, or both.

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