MEMS power inductor with magnetic laminations formed in a crack resistant high aspect ratio structure
First Claim
Patent Images
1. A semiconductor inductor comprising:
- a first structure being non-conductive and having a top surface;
a second structure being non-conductive and having a top surface, a side wall surface, and a bottom surface, the bottom surface touching the top surface of the first structure;
a third structure being non-conductive and having a top surface, a side wall surface, and a bottom surface, the bottom surface of the third structure touching the top surface of the first structure, the side wall surface of the third structure touching the side wall surface of the second structure, the second structure and the third structure having different material characteristics;
a plurality of lower magnetic structures that touch the first and third structures, each lower magnetic structure having a top surface, and being spaced apart and electrically isolated from each other lower magnetic structure;
a fourth structure being non-conductive and having a top surface, and a bottom surface, the bottom surface of the fourth structure touching the top surfaces of the second structure, the third structure, and each lower magnetic structure; and
a conductive trace having a top surface, touching the fourth structure, and lying directly over and spaced apart from each of the lower magnetic structures.
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Abstract
Magnetic laminations are formed in the openings of a first non-conductive structure, which is formed in the opening of a second non-conductive structure that has a maximum aspect ratio that is less than the maximum aspect ratio of the first non-conductive structure. The second non-conductive structure is more crack resistant than the first non-conductive structure, and thereby protects the first non-conductive structure and the magnetic laminations from environmental contaminants.
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Citations
20 Claims
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1. A semiconductor inductor comprising:
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a first structure being non-conductive and having a top surface; a second structure being non-conductive and having a top surface, a side wall surface, and a bottom surface, the bottom surface touching the top surface of the first structure; a third structure being non-conductive and having a top surface, a side wall surface, and a bottom surface, the bottom surface of the third structure touching the top surface of the first structure, the side wall surface of the third structure touching the side wall surface of the second structure, the second structure and the third structure having different material characteristics; a plurality of lower magnetic structures that touch the first and third structures, each lower magnetic structure having a top surface, and being spaced apart and electrically isolated from each other lower magnetic structure; a fourth structure being non-conductive and having a top surface, and a bottom surface, the bottom surface of the fourth structure touching the top surfaces of the second structure, the third structure, and each lower magnetic structure; and a conductive trace having a top surface, touching the fourth structure, and lying directly over and spaced apart from each of the lower magnetic structures. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A method of forming a semiconductor inductor comprising:
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forming a first structure being non-conductive and having a top surface; forming a second structure being non-conductive and having a top surface, a side wall surface, and a bottom surface, the bottom surface touching the top surface of the first structure; forming a third structure being non-conductive and having a top surface, a side wall surface, and a bottom surface, the bottom surface of the third structure touching the top surface of the first structure, the side wall surface of the third structure touching the side wall surface of the second structure, the second structure and the third structure having different material characteristics; forming a plurality of lower magnetic structures that touch the first and third structures, each lower magnetic structure having a top surface, and being spaced apart and electrically isolated from each other lower magnetic structure; forming a fourth structure being non-conductive and having a top surface, and a bottom surface, the bottom surface of the fourth structure touching the top surfaces of the second structure, the third structure, and each lower magnetic structure; and forming a conductive trace having a top surface, touching the fourth structure, and lying directly over and spaced apart from each of the lower magnetic structures.
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Specification