High frequency power supply
First Claim
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1. A method performed by a plasma power supply device for determining a wave running time between the plasma power supply device and a load connected to the plasma power supply device, the method comprising:
- transmitting at least one RF pulse forward from the plasma power supply device to the load;
starting a time measurement at a start time that relates to the transmittal of the at least one RF pulse;
measuring a return time on arrival of the pulse reflected by the load and transmitted backward to the plasma power supply device; and
determining the wave running time based on the start time and the return time.
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Abstract
For determining a wave running time between a RF source in a plasma power supply device and a load connected to the plasma power supply device, an RF pulse is transmitted forwards from the RF source to the load. The pulses are reflected by the load and transmitted backwards to the power source. A return time measured on arrival of the pulse(s) at the inverter is used to determine a wave running time.
102 Citations
27 Claims
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1. A method performed by a plasma power supply device for determining a wave running time between the plasma power supply device and a load connected to the plasma power supply device, the method comprising:
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transmitting at least one RF pulse forward from the plasma power supply device to the load; starting a time measurement at a start time that relates to the transmittal of the at least one RF pulse; measuring a return time on arrival of the pulse reflected by the load and transmitted backward to the plasma power supply device; and determining the wave running time based on the start time and the return time. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A plasma power supply device for generating an output power greater than 500 W at an essentially constant basic frequency of at least 3 MHz and for powering a load to which the output power is supplied and from which reflected power is returned to the plasma power supply device, at least in the event of an impedance mismatch between the plasma power supply device and the load, the load including an impedance of the plasma process in operation, the plasma power supply device comprising:
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an RF source configured for supplying the output power and for supplying a measurement signal to the load; a control system for activating the RF source; and a time measurement device between the RF source and the load for measuring a return time of the measurement signal being reflected from the load, wherein the control system is configured to; activate an inverter for supplying the measurement signal, start a time measurement of the time measurement device at a start time that relates to the activation of the inverter for supplying the measurement signal, end the time measurement at a return time, when the measurement signal returns to the time measurement device, and derive a wave running time of the measurement signal between the plasma power supply device based on the start time and the return time. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification