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Identifying features on a surface of an object using wavelet analysis

  • US 8,467,978 B2
  • Filed: 08/31/2010
  • Issued: 06/18/2013
  • Est. Priority Date: 08/31/2010
  • Status: Active Grant
First Claim
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1. A method for inspecting a surface of an object, the method comprising:

  • obtaining data from measuring the surface of the object to form surface data for the object;

    selecting a range of frequencies for features on the object based on a range of distances between adjacent peaks for the features, wherein the features are formed by a tool moving along a number of paths;

    obtaining desired surface data for the features from the surface data using the range of frequencies selected;

    determining whether the desired surface data for the features meets a policy identifying a desired surface for the object; and

    responsive to an absence of a determination that the desired surface data for the features meets the policy, reworking the object.

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